JPS5388567A - Laser scribing apparatus - Google Patents

Laser scribing apparatus

Info

Publication number
JPS5388567A
JPS5388567A JP340277A JP340277A JPS5388567A JP S5388567 A JPS5388567 A JP S5388567A JP 340277 A JP340277 A JP 340277A JP 340277 A JP340277 A JP 340277A JP S5388567 A JPS5388567 A JP S5388567A
Authority
JP
Japan
Prior art keywords
laser scribing
scribing apparatus
laser beam
substrate
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP340277A
Other languages
Japanese (ja)
Inventor
Sokichi Yamagishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP340277A priority Critical patent/JPS5388567A/en
Publication of JPS5388567A publication Critical patent/JPS5388567A/en
Pending legal-status Critical Current

Links

Landscapes

  • Dicing (AREA)
  • Lasers (AREA)
  • Laser Beam Processing (AREA)

Abstract

PURPOSE:To prevent the semiconductor particles produced from the portions where a laser beam falls to from fusing on substrate surface by radiating the laser beam scribing the semiconductor substrate to the substrate back and performing position alignment by aligning the optical axis of an optical apparatus to the central axis of the beam on the front side.
JP340277A 1977-01-13 1977-01-13 Laser scribing apparatus Pending JPS5388567A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP340277A JPS5388567A (en) 1977-01-13 1977-01-13 Laser scribing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP340277A JPS5388567A (en) 1977-01-13 1977-01-13 Laser scribing apparatus

Publications (1)

Publication Number Publication Date
JPS5388567A true JPS5388567A (en) 1978-08-04

Family

ID=11556372

Family Applications (1)

Application Number Title Priority Date Filing Date
JP340277A Pending JPS5388567A (en) 1977-01-13 1977-01-13 Laser scribing apparatus

Country Status (1)

Country Link
JP (1) JPS5388567A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003124154A (en) * 2001-10-15 2003-04-25 Shinko Electric Ind Co Ltd Hole formation method of silicon substrate
JP2006255724A (en) * 2005-03-15 2006-09-28 Disco Abrasive Syst Ltd Laser beam machining device
JP2012011440A (en) * 2010-07-02 2012-01-19 Disco Corp Laser beam machining device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003124154A (en) * 2001-10-15 2003-04-25 Shinko Electric Ind Co Ltd Hole formation method of silicon substrate
JP2006255724A (en) * 2005-03-15 2006-09-28 Disco Abrasive Syst Ltd Laser beam machining device
JP4648044B2 (en) * 2005-03-15 2011-03-09 株式会社ディスコ Laser processing equipment
JP2012011440A (en) * 2010-07-02 2012-01-19 Disco Corp Laser beam machining device

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