JPS5388567A - Laser scribing apparatus - Google Patents
Laser scribing apparatusInfo
- Publication number
- JPS5388567A JPS5388567A JP340277A JP340277A JPS5388567A JP S5388567 A JPS5388567 A JP S5388567A JP 340277 A JP340277 A JP 340277A JP 340277 A JP340277 A JP 340277A JP S5388567 A JPS5388567 A JP S5388567A
- Authority
- JP
- Japan
- Prior art keywords
- laser scribing
- scribing apparatus
- laser beam
- substrate
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Dicing (AREA)
- Lasers (AREA)
- Laser Beam Processing (AREA)
Abstract
PURPOSE:To prevent the semiconductor particles produced from the portions where a laser beam falls to from fusing on substrate surface by radiating the laser beam scribing the semiconductor substrate to the substrate back and performing position alignment by aligning the optical axis of an optical apparatus to the central axis of the beam on the front side.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP340277A JPS5388567A (en) | 1977-01-13 | 1977-01-13 | Laser scribing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP340277A JPS5388567A (en) | 1977-01-13 | 1977-01-13 | Laser scribing apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5388567A true JPS5388567A (en) | 1978-08-04 |
Family
ID=11556372
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP340277A Pending JPS5388567A (en) | 1977-01-13 | 1977-01-13 | Laser scribing apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5388567A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003124154A (en) * | 2001-10-15 | 2003-04-25 | Shinko Electric Ind Co Ltd | Hole formation method of silicon substrate |
JP2006255724A (en) * | 2005-03-15 | 2006-09-28 | Disco Abrasive Syst Ltd | Laser beam machining device |
JP2012011440A (en) * | 2010-07-02 | 2012-01-19 | Disco Corp | Laser beam machining device |
-
1977
- 1977-01-13 JP JP340277A patent/JPS5388567A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003124154A (en) * | 2001-10-15 | 2003-04-25 | Shinko Electric Ind Co Ltd | Hole formation method of silicon substrate |
JP2006255724A (en) * | 2005-03-15 | 2006-09-28 | Disco Abrasive Syst Ltd | Laser beam machining device |
JP4648044B2 (en) * | 2005-03-15 | 2011-03-09 | 株式会社ディスコ | Laser processing equipment |
JP2012011440A (en) * | 2010-07-02 | 2012-01-19 | Disco Corp | Laser beam machining device |
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