JPS6429820A - Active matrix cell and its production - Google Patents
Active matrix cell and its productionInfo
- Publication number
- JPS6429820A JPS6429820A JP62185083A JP18508387A JPS6429820A JP S6429820 A JPS6429820 A JP S6429820A JP 62185083 A JP62185083 A JP 62185083A JP 18508387 A JP18508387 A JP 18508387A JP S6429820 A JPS6429820 A JP S6429820A
- Authority
- JP
- Japan
- Prior art keywords
- conductor
- semiconductor
- insulator
- production
- layered region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Thin Film Transistor (AREA)
Abstract
PURPOSE:To enhance the stability at the boundary face between semiconductor films and insulator films and to prevent the shorting between a 2nd conductor and the semiconductor. CONSTITUTION:The conductor 103a consisting of an a-Si film provided partly superposed on the 1st conductor 102 and the 1st insulator 103b consisting of the SiNx film thereof are continuously deposited to form a 2-layered region 103. The 2nd insulator 104 constituted of SiNx is formed on the side face of the semiconductor of the 2-layered region 103 and the 2nd conductor 105 is formed on the 2-layered region 103, the 2nd insulator 104 and the 1st conductor 102. The 2nd conductor 105 and the semiconductor 103a are, therefore, insulated by the 2nd insulator 104 on the side face of the semiconductor 103a of the 2-layered region 103. The stability at the boundary face between the semiconductor 103a and the insulator 103b is thereby enhanced and the shorting between the 2nd conductor 105 and the semiconductor 103a is prevented.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62185083A JPS6429820A (en) | 1987-07-24 | 1987-07-24 | Active matrix cell and its production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62185083A JPS6429820A (en) | 1987-07-24 | 1987-07-24 | Active matrix cell and its production |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6429820A true JPS6429820A (en) | 1989-01-31 |
Family
ID=16164526
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62185083A Pending JPS6429820A (en) | 1987-07-24 | 1987-07-24 | Active matrix cell and its production |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6429820A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5654369A (en) * | 1995-07-25 | 1997-08-05 | Dai-Ichi Kogyo Seiyaku Co., Ltd. | Antistatic thermoplastic resin composition |
-
1987
- 1987-07-24 JP JP62185083A patent/JPS6429820A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5654369A (en) * | 1995-07-25 | 1997-08-05 | Dai-Ichi Kogyo Seiyaku Co., Ltd. | Antistatic thermoplastic resin composition |
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