JPS642792B2 - - Google Patents

Info

Publication number
JPS642792B2
JPS642792B2 JP6283584A JP6283584A JPS642792B2 JP S642792 B2 JPS642792 B2 JP S642792B2 JP 6283584 A JP6283584 A JP 6283584A JP 6283584 A JP6283584 A JP 6283584A JP S642792 B2 JPS642792 B2 JP S642792B2
Authority
JP
Japan
Prior art keywords
chamber
pure water
working fluid
valve
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6283584A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60206986A (ja
Inventor
Reiichi Sugawara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NOBA KK
Original Assignee
NOBA KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NOBA KK filed Critical NOBA KK
Priority to JP6283584A priority Critical patent/JPS60206986A/ja
Publication of JPS60206986A publication Critical patent/JPS60206986A/ja
Publication of JPS642792B2 publication Critical patent/JPS642792B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP6283584A 1984-03-30 1984-03-30 洗浄用純水吐出ポンプ Granted JPS60206986A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6283584A JPS60206986A (ja) 1984-03-30 1984-03-30 洗浄用純水吐出ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6283584A JPS60206986A (ja) 1984-03-30 1984-03-30 洗浄用純水吐出ポンプ

Publications (2)

Publication Number Publication Date
JPS60206986A JPS60206986A (ja) 1985-10-18
JPS642792B2 true JPS642792B2 (cg-RX-API-DMAC7.html) 1989-01-18

Family

ID=13211765

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6283584A Granted JPS60206986A (ja) 1984-03-30 1984-03-30 洗浄用純水吐出ポンプ

Country Status (1)

Country Link
JP (1) JPS60206986A (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6453078A (en) * 1987-08-18 1989-03-01 Japan Res Dev Corp Fluid compressor

Also Published As

Publication number Publication date
JPS60206986A (ja) 1985-10-18

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