JPS6426186U - - Google Patents

Info

Publication number
JPS6426186U
JPS6426186U JP12094387U JP12094387U JPS6426186U JP S6426186 U JPS6426186 U JP S6426186U JP 12094387 U JP12094387 U JP 12094387U JP 12094387 U JP12094387 U JP 12094387U JP S6426186 U JPS6426186 U JP S6426186U
Authority
JP
Japan
Prior art keywords
handling arm
shaft
hole provided
step motor
wafer transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12094387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0639452Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987120943U priority Critical patent/JPH0639452Y2/ja
Publication of JPS6426186U publication Critical patent/JPS6426186U/ja
Application granted granted Critical
Publication of JPH0639452Y2 publication Critical patent/JPH0639452Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
JP1987120943U 1987-08-06 1987-08-06 ウェハ搬送用のハンドリングアーム装置 Expired - Lifetime JPH0639452Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987120943U JPH0639452Y2 (ja) 1987-08-06 1987-08-06 ウェハ搬送用のハンドリングアーム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987120943U JPH0639452Y2 (ja) 1987-08-06 1987-08-06 ウェハ搬送用のハンドリングアーム装置

Publications (2)

Publication Number Publication Date
JPS6426186U true JPS6426186U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-02-14
JPH0639452Y2 JPH0639452Y2 (ja) 1994-10-12

Family

ID=31367505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987120943U Expired - Lifetime JPH0639452Y2 (ja) 1987-08-06 1987-08-06 ウェハ搬送用のハンドリングアーム装置

Country Status (1)

Country Link
JP (1) JPH0639452Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0477724U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1990-11-19 1992-07-07

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5919693A (ja) * 1982-07-20 1984-02-01 三洋電機株式会社 マニプレ−タの駆動装置
JPS6039084A (ja) * 1983-08-09 1985-02-28 株式会社東芝 ロボット装置
JPS60108589A (ja) * 1983-11-15 1985-06-14 Yuukou Shoji Kk 移送，圧送，並びに吸引装置
JPS60141487A (ja) * 1983-12-28 1985-07-26 株式会社日立製作所 ロボツト用ア−ム
JPS60143199U (ja) * 1984-03-06 1985-09-21 特殊電装株式会社 電動送風機における冷却機構
JPS62222906A (ja) * 1986-03-25 1987-09-30 Hitachi Electronics Eng Co Ltd ウエ−ハ搬送機構
JPS62240218A (ja) * 1986-04-10 1987-10-21 Mitsubishi Electric Corp ウエハ搬送装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5919693A (ja) * 1982-07-20 1984-02-01 三洋電機株式会社 マニプレ−タの駆動装置
JPS6039084A (ja) * 1983-08-09 1985-02-28 株式会社東芝 ロボット装置
JPS60108589A (ja) * 1983-11-15 1985-06-14 Yuukou Shoji Kk 移送，圧送，並びに吸引装置
JPS60141487A (ja) * 1983-12-28 1985-07-26 株式会社日立製作所 ロボツト用ア−ム
JPS60143199U (ja) * 1984-03-06 1985-09-21 特殊電装株式会社 電動送風機における冷却機構
JPS62222906A (ja) * 1986-03-25 1987-09-30 Hitachi Electronics Eng Co Ltd ウエ−ハ搬送機構
JPS62240218A (ja) * 1986-04-10 1987-10-21 Mitsubishi Electric Corp ウエハ搬送装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0477724U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1990-11-19 1992-07-07

Also Published As

Publication number Publication date
JPH0639452Y2 (ja) 1994-10-12

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