JPS6426105A - Surface shape measuring instrument - Google Patents

Surface shape measuring instrument

Info

Publication number
JPS6426105A
JPS6426105A JP5830687A JP5830687A JPS6426105A JP S6426105 A JPS6426105 A JP S6426105A JP 5830687 A JP5830687 A JP 5830687A JP 5830687 A JP5830687 A JP 5830687A JP S6426105 A JPS6426105 A JP S6426105A
Authority
JP
Japan
Prior art keywords
focusing state
objective
intersection
optical system
measuring instrument
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5830687A
Other languages
English (en)
Other versions
JPH07122570B2 (ja
Inventor
Koji Narumi
Keiji Watanabe
Kotaro Hosaka
Makoto Higomura
Sekinori Yamamoto
Tetsushi Nose
Yukichi Niwa
Mitsutoshi Owada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP62058306A priority Critical patent/JPH07122570B2/ja
Publication of JPS6426105A publication Critical patent/JPS6426105A/ja
Publication of JPH07122570B2 publication Critical patent/JPH07122570B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP62058306A 1987-03-13 1987-03-13 面形状測定装置 Expired - Fee Related JPH07122570B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62058306A JPH07122570B2 (ja) 1987-03-13 1987-03-13 面形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62058306A JPH07122570B2 (ja) 1987-03-13 1987-03-13 面形状測定装置

Publications (2)

Publication Number Publication Date
JPS6426105A true JPS6426105A (en) 1989-01-27
JPH07122570B2 JPH07122570B2 (ja) 1995-12-25

Family

ID=13080548

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62058306A Expired - Fee Related JPH07122570B2 (ja) 1987-03-13 1987-03-13 面形状測定装置

Country Status (1)

Country Link
JP (1) JPH07122570B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02254305A (ja) * 1989-03-28 1990-10-15 Matsushita Electric Ind Co Ltd 光学測定装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5876711A (ja) * 1981-10-31 1983-05-09 Matsushita Electric Works Ltd 回転体の表面粗さ測定方法およびその装置
JPS6117907A (ja) * 1984-07-05 1986-01-25 Canon Inc ３次元形状測定装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5876711A (ja) * 1981-10-31 1983-05-09 Matsushita Electric Works Ltd 回転体の表面粗さ測定方法およびその装置
JPS6117907A (ja) * 1984-07-05 1986-01-25 Canon Inc ３次元形状測定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02254305A (ja) * 1989-03-28 1990-10-15 Matsushita Electric Ind Co Ltd 光学測定装置

Also Published As

Publication number Publication date
JPH07122570B2 (ja) 1995-12-25

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees