JPS6425976A - Sputtering device - Google Patents
Sputtering deviceInfo
- Publication number
- JPS6425976A JPS6425976A JP18038787A JP18038787A JPS6425976A JP S6425976 A JPS6425976 A JP S6425976A JP 18038787 A JP18038787 A JP 18038787A JP 18038787 A JP18038787 A JP 18038787A JP S6425976 A JPS6425976 A JP S6425976A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- reflector
- gas introducing
- chamber
- plural
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18038787A JPS6425976A (en) | 1987-07-20 | 1987-07-20 | Sputtering device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18038787A JPS6425976A (en) | 1987-07-20 | 1987-07-20 | Sputtering device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6425976A true JPS6425976A (en) | 1989-01-27 |
JPH0240738B2 JPH0240738B2 (ja) | 1990-09-13 |
Family
ID=16082341
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18038787A Granted JPS6425976A (en) | 1987-07-20 | 1987-07-20 | Sputtering device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6425976A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02225663A (ja) * | 1989-02-27 | 1990-09-07 | Tokuda Seisakusho Ltd | スパッタ装置 |
US5582017A (en) * | 1994-04-28 | 1996-12-10 | Ebara Corporation | Cryopump |
WO2011010164A2 (en) | 2009-07-24 | 2011-01-27 | Natural Adcampaign Limited | Printable advertising and display supports |
-
1987
- 1987-07-20 JP JP18038787A patent/JPS6425976A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02225663A (ja) * | 1989-02-27 | 1990-09-07 | Tokuda Seisakusho Ltd | スパッタ装置 |
US5582017A (en) * | 1994-04-28 | 1996-12-10 | Ebara Corporation | Cryopump |
WO2011010164A2 (en) | 2009-07-24 | 2011-01-27 | Natural Adcampaign Limited | Printable advertising and display supports |
Also Published As
Publication number | Publication date |
---|---|
JPH0240738B2 (ja) | 1990-09-13 |
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