JPS6425589A - Semiconductor laser array - Google Patents
Semiconductor laser arrayInfo
- Publication number
- JPS6425589A JPS6425589A JP18253287A JP18253287A JPS6425589A JP S6425589 A JPS6425589 A JP S6425589A JP 18253287 A JP18253287 A JP 18253287A JP 18253287 A JP18253287 A JP 18253287A JP S6425589 A JPS6425589 A JP S6425589A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- grown
- semiconductor laser
- light emitting
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To reduce the interval of light emitting sections and to change wavelength by using longitudinally arranged two double hetero p-n junctions as light emitting sections. CONSTITUTION:A mesa 18 is formed on a p-type GaAs substrate and an n-type GaAs layer 2 is grown to cover it up. A groove 16 and a ridge 19 which are to be current channels are formed on the mesa, and layers 3-7 are grown by liquid growth. After a groove 17 which is to be a current channel is formed, an n-GaAlAs layer 8, a GaAlAs layer 9, a p-GaAlAs layer 10 and a p-GaAs layer 11 are liquid phase-grown. Then a groove 20 is formed to attain to an n-GaAs layer 6. After this, the entire upper surface is covered with SiO2 leaving SiO2 only over an etching edge surface 21. Then upper electrodes 13 and 14 are vaporization-formed on p-type and n-type GaAs layer 1 and 6, respectively. On the entire surface of substrate, an electrode 15 is vaporized. As for the spectral characteristics of semiconductor laser arrays when driven at once, the interval of light emitting sections is about 10mum and different oscillation wavelengthes can be acquired allowing independent driving of each semiconductor laser.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62182532A JP2523664B2 (en) | 1987-07-22 | 1987-07-22 | Semiconductor laser array device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62182532A JP2523664B2 (en) | 1987-07-22 | 1987-07-22 | Semiconductor laser array device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6425589A true JPS6425589A (en) | 1989-01-27 |
JP2523664B2 JP2523664B2 (en) | 1996-08-14 |
Family
ID=16119952
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62182532A Expired - Fee Related JP2523664B2 (en) | 1987-07-22 | 1987-07-22 | Semiconductor laser array device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2523664B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5638391A (en) * | 1994-12-21 | 1997-06-10 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor laser device and optical disc apparatus provided with the semiclonductor laser device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6187384A (en) * | 1984-09-13 | 1986-05-02 | Seiko Epson Corp | Laminated multi-wavelength semiconductor laser device |
JPS62115795A (en) * | 1985-11-14 | 1987-05-27 | Matsushita Electric Ind Co Ltd | Semiconductor laser array device |
-
1987
- 1987-07-22 JP JP62182532A patent/JP2523664B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6187384A (en) * | 1984-09-13 | 1986-05-02 | Seiko Epson Corp | Laminated multi-wavelength semiconductor laser device |
JPS62115795A (en) * | 1985-11-14 | 1987-05-27 | Matsushita Electric Ind Co Ltd | Semiconductor laser array device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5638391A (en) * | 1994-12-21 | 1997-06-10 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor laser device and optical disc apparatus provided with the semiclonductor laser device |
Also Published As
Publication number | Publication date |
---|---|
JP2523664B2 (en) | 1996-08-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |