JPS6425052A - Polyimide electric capacitance type moisture sensing element - Google Patents

Polyimide electric capacitance type moisture sensing element

Info

Publication number
JPS6425052A
JPS6425052A JP16625187A JP16625187A JPS6425052A JP S6425052 A JPS6425052 A JP S6425052A JP 16625187 A JP16625187 A JP 16625187A JP 16625187 A JP16625187 A JP 16625187A JP S6425052 A JPS6425052 A JP S6425052A
Authority
JP
Japan
Prior art keywords
polyimide
sensing element
solution
thin
capacitance type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16625187A
Other languages
Japanese (ja)
Other versions
JPH0679002B2 (en
Inventor
Jii Eru Chien Suteiibun
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Industrial Technology Research Institute ITRI
Original Assignee
Industrial Technology Research Institute ITRI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Industrial Technology Research Institute ITRI filed Critical Industrial Technology Research Institute ITRI
Priority to JP62166251A priority Critical patent/JPH0679002B2/en
Publication of JPS6425052A publication Critical patent/JPS6425052A/en
Publication of JPH0679002B2 publication Critical patent/JPH0679002B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

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  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

PURPOSE: To manufacture a stable electric capacity type humidity sensing element which can excellently sense humidity and can respond quickly by providing a polyimide film on a corrosionresistant metallic substrate without using any adhesive and forming a water-permeable thin metallic layer on the polyimide film. CONSTITUTION: Firstly, a polyamic acid (polyimide precursor) solution which is not yet changed to sub-polyimide or a mixed solution 2 of soluble polyimide which has been changed to sub-polyimide and polyamic acid is applied to the surface of a metallic substrate 1. Then the solution is dried to a thin film of about 0.1-50μm in thickness by gradually heating the substrate 1 to about 350 deg.C from a room temperature. Then a thin water-permeable gold electrode 3 is formed by vapordepositing a small amount of gold on the polyimide film by vacuum deposition.
JP62166251A 1987-07-02 1987-07-02 Polyimide capacitance type humidity sensing element Expired - Fee Related JPH0679002B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62166251A JPH0679002B2 (en) 1987-07-02 1987-07-02 Polyimide capacitance type humidity sensing element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62166251A JPH0679002B2 (en) 1987-07-02 1987-07-02 Polyimide capacitance type humidity sensing element

Publications (2)

Publication Number Publication Date
JPS6425052A true JPS6425052A (en) 1989-01-27
JPH0679002B2 JPH0679002B2 (en) 1994-10-05

Family

ID=15827920

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62166251A Expired - Fee Related JPH0679002B2 (en) 1987-07-02 1987-07-02 Polyimide capacitance type humidity sensing element

Country Status (1)

Country Link
JP (1) JPH0679002B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01156655A (en) * 1987-12-15 1989-06-20 Mitsubishi Kasei Corp Humidity sensor
JPH01156654A (en) * 1987-12-15 1989-06-20 Mitsubishi Kasei Corp Humidity sensor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5870153A (en) * 1981-10-23 1983-04-26 Fuji Xerox Co Ltd Detector for temperature and humidity
JPS60188835A (en) * 1984-03-08 1985-09-26 Sharp Corp Moisture sensitive material

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5870153A (en) * 1981-10-23 1983-04-26 Fuji Xerox Co Ltd Detector for temperature and humidity
JPS60188835A (en) * 1984-03-08 1985-09-26 Sharp Corp Moisture sensitive material

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01156655A (en) * 1987-12-15 1989-06-20 Mitsubishi Kasei Corp Humidity sensor
JPH01156654A (en) * 1987-12-15 1989-06-20 Mitsubishi Kasei Corp Humidity sensor

Also Published As

Publication number Publication date
JPH0679002B2 (en) 1994-10-05

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees