JPS6425052A - Polyimide electric capacitance type moisture sensing element - Google Patents
Polyimide electric capacitance type moisture sensing elementInfo
- Publication number
- JPS6425052A JPS6425052A JP16625187A JP16625187A JPS6425052A JP S6425052 A JPS6425052 A JP S6425052A JP 16625187 A JP16625187 A JP 16625187A JP 16625187 A JP16625187 A JP 16625187A JP S6425052 A JPS6425052 A JP S6425052A
- Authority
- JP
- Japan
- Prior art keywords
- polyimide
- sensing element
- solution
- thin
- capacitance type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
PURPOSE: To manufacture a stable electric capacity type humidity sensing element which can excellently sense humidity and can respond quickly by providing a polyimide film on a corrosionresistant metallic substrate without using any adhesive and forming a water-permeable thin metallic layer on the polyimide film. CONSTITUTION: Firstly, a polyamic acid (polyimide precursor) solution which is not yet changed to sub-polyimide or a mixed solution 2 of soluble polyimide which has been changed to sub-polyimide and polyamic acid is applied to the surface of a metallic substrate 1. Then the solution is dried to a thin film of about 0.1-50μm in thickness by gradually heating the substrate 1 to about 350 deg.C from a room temperature. Then a thin water-permeable gold electrode 3 is formed by vapordepositing a small amount of gold on the polyimide film by vacuum deposition.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62166251A JPH0679002B2 (en) | 1987-07-02 | 1987-07-02 | Polyimide capacitance type humidity sensing element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62166251A JPH0679002B2 (en) | 1987-07-02 | 1987-07-02 | Polyimide capacitance type humidity sensing element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6425052A true JPS6425052A (en) | 1989-01-27 |
JPH0679002B2 JPH0679002B2 (en) | 1994-10-05 |
Family
ID=15827920
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62166251A Expired - Fee Related JPH0679002B2 (en) | 1987-07-02 | 1987-07-02 | Polyimide capacitance type humidity sensing element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0679002B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01156655A (en) * | 1987-12-15 | 1989-06-20 | Mitsubishi Kasei Corp | Humidity sensor |
JPH01156654A (en) * | 1987-12-15 | 1989-06-20 | Mitsubishi Kasei Corp | Humidity sensor |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5870153A (en) * | 1981-10-23 | 1983-04-26 | Fuji Xerox Co Ltd | Detector for temperature and humidity |
JPS60188835A (en) * | 1984-03-08 | 1985-09-26 | Sharp Corp | Moisture sensitive material |
-
1987
- 1987-07-02 JP JP62166251A patent/JPH0679002B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5870153A (en) * | 1981-10-23 | 1983-04-26 | Fuji Xerox Co Ltd | Detector for temperature and humidity |
JPS60188835A (en) * | 1984-03-08 | 1985-09-26 | Sharp Corp | Moisture sensitive material |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01156655A (en) * | 1987-12-15 | 1989-06-20 | Mitsubishi Kasei Corp | Humidity sensor |
JPH01156654A (en) * | 1987-12-15 | 1989-06-20 | Mitsubishi Kasei Corp | Humidity sensor |
Also Published As
Publication number | Publication date |
---|---|
JPH0679002B2 (en) | 1994-10-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |