JPS642438Y2 - - Google Patents
Info
- Publication number
- JPS642438Y2 JPS642438Y2 JP10879081U JP10879081U JPS642438Y2 JP S642438 Y2 JPS642438 Y2 JP S642438Y2 JP 10879081 U JP10879081 U JP 10879081U JP 10879081 U JP10879081 U JP 10879081U JP S642438 Y2 JPS642438 Y2 JP S642438Y2
- Authority
- JP
- Japan
- Prior art keywords
- cup
- air
- inner tank
- wafer
- discharge port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012530 fluid Substances 0.000 claims description 16
- 239000000126 substance Substances 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 10
- 238000007747 plating Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000005530 etching Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10879081U JPS5815347U (ja) | 1981-07-22 | 1981-07-22 | ウエハ処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10879081U JPS5815347U (ja) | 1981-07-22 | 1981-07-22 | ウエハ処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5815347U JPS5815347U (ja) | 1983-01-31 |
| JPS642438Y2 true JPS642438Y2 (enrdf_load_stackoverflow) | 1989-01-20 |
Family
ID=29903181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10879081U Granted JPS5815347U (ja) | 1981-07-22 | 1981-07-22 | ウエハ処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5815347U (enrdf_load_stackoverflow) |
-
1981
- 1981-07-22 JP JP10879081U patent/JPS5815347U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5815347U (ja) | 1983-01-31 |
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