JPS5815347U - ウエハ処理装置 - Google Patents

ウエハ処理装置

Info

Publication number
JPS5815347U
JPS5815347U JP10879081U JP10879081U JPS5815347U JP S5815347 U JPS5815347 U JP S5815347U JP 10879081 U JP10879081 U JP 10879081U JP 10879081 U JP10879081 U JP 10879081U JP S5815347 U JPS5815347 U JP S5815347U
Authority
JP
Japan
Prior art keywords
wafer processing
processing equipment
inner tank
cup
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10879081U
Other languages
English (en)
Japanese (ja)
Other versions
JPS642438Y2 (enrdf_load_stackoverflow
Inventor
久道　正孝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP10879081U priority Critical patent/JPS5815347U/ja
Publication of JPS5815347U publication Critical patent/JPS5815347U/ja
Application granted granted Critical
Publication of JPS642438Y2 publication Critical patent/JPS642438Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP10879081U 1981-07-22 1981-07-22 ウエハ処理装置 Granted JPS5815347U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10879081U JPS5815347U (ja) 1981-07-22 1981-07-22 ウエハ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10879081U JPS5815347U (ja) 1981-07-22 1981-07-22 ウエハ処理装置

Publications (2)

Publication Number Publication Date
JPS5815347U true JPS5815347U (ja) 1983-01-31
JPS642438Y2 JPS642438Y2 (enrdf_load_stackoverflow) 1989-01-20

Family

ID=29903181

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10879081U Granted JPS5815347U (ja) 1981-07-22 1981-07-22 ウエハ処理装置

Country Status (1)

Country Link
JP (1) JPS5815347U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS642438Y2 (enrdf_load_stackoverflow) 1989-01-20

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