JPS642438Y2 - - Google Patents
Info
- Publication number
- JPS642438Y2 JPS642438Y2 JP10879081U JP10879081U JPS642438Y2 JP S642438 Y2 JPS642438 Y2 JP S642438Y2 JP 10879081 U JP10879081 U JP 10879081U JP 10879081 U JP10879081 U JP 10879081U JP S642438 Y2 JPS642438 Y2 JP S642438Y2
- Authority
- JP
- Japan
- Prior art keywords
- cup
- air
- inner tank
- wafer
- discharge port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012530 fluid Substances 0.000 claims description 16
- 239000000126 substance Substances 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 10
- 238000007747 plating Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000005530 etching Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10879081U JPS5815347U (ja) | 1981-07-22 | 1981-07-22 | ウエハ処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10879081U JPS5815347U (ja) | 1981-07-22 | 1981-07-22 | ウエハ処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5815347U JPS5815347U (ja) | 1983-01-31 |
| JPS642438Y2 true JPS642438Y2 (cs) | 1989-01-20 |
Family
ID=29903181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10879081U Granted JPS5815347U (ja) | 1981-07-22 | 1981-07-22 | ウエハ処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5815347U (cs) |
-
1981
- 1981-07-22 JP JP10879081U patent/JPS5815347U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5815347U (ja) | 1983-01-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| FI56934C (fi) | Saett att loesa en gas i en vaetska samt anordning foer genomfoerande av saettet | |
| CN211813758U (zh) | 自动油水分离系统 | |
| JPS642438Y2 (cs) | ||
| CA2320659A1 (en) | Process and apparatus for sludge and scum extraction | |
| EP0146798B1 (de) | Verfahren zum umweltfreundlichen Ätzen von Leiterplatten und Vorrichtung zur Ausübung des Arbeitsverfahrens | |
| CN219711916U (zh) | 虹吸进出水模块结构 | |
| CN211724816U (zh) | 一种取样水固体颗粒过滤装置 | |
| KR810001907B1 (ko) | 세정 배수중에 혼입하는 유기용제의 검출분리장치 | |
| CN103614735A (zh) | 一种电镀铜球清洗装置 | |
| JP3320036B2 (ja) | 砂分離装置 | |
| JPS5491863A (en) | Method and device for crude oil sludge removal | |
| JPS57190693A (en) | Apparatus for purifying sewage | |
| CN211946308U (zh) | 一种印刷污水处理装置 | |
| CN221351934U (zh) | 一种显影液采集装置 | |
| JPH07232Y2 (ja) | 浮上分離装置 | |
| CN210958999U (zh) | 一种非连续微蚀槽 | |
| JPS57170537A (en) | Treating method and device for semiconductor wafer | |
| JPH086034Y2 (ja) | グリコール液焼入れ後の二次温水洗浄槽 | |
| KR101717261B1 (ko) | 기판 처리 방법 및 기판 처리 장치 | |
| CN207085383U (zh) | 一种高效分离带水剂的酯化反应系统 | |
| JPH0113593Y2 (cs) | ||
| JPS641036Y2 (cs) | ||
| JPH0611832U (ja) | 凍結防止剤としての塩化ナトリウム等の水溶液作製装置 | |
| JPH0510955Y2 (cs) | ||
| US2790455A (en) | Siphoning device |