JPS642345A - Semiconductor integrated circuit device - Google Patents
Semiconductor integrated circuit deviceInfo
- Publication number
- JPS642345A JPS642345A JP15828487A JP15828487A JPS642345A JP S642345 A JPS642345 A JP S642345A JP 15828487 A JP15828487 A JP 15828487A JP 15828487 A JP15828487 A JP 15828487A JP S642345 A JPS642345 A JP S642345A
- Authority
- JP
- Japan
- Prior art keywords
- resistor
- bonding pad
- pad
- films
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/0802—Resistors only
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE:To contrive an increase in the integration of an IC by a method wherein a polyclystalline Si resistor is provided under a bonding pad to constitute a bonding pad part in a multilayer. CONSTITUTION:A bonding pad part is constituted of a bonding pad 2 consisting of Al, a poly Si resistor Rp, Al wiring layers 6, insulating films 7 and 8, a covering insulating film 9 and a semiconductor substrate 10. Here, the resistor Rp is formed being held between the films 7 and 8 and the films 7 and 8 and the resistor Rp are arranged under the pad 2. Thereby, as the bonding pad part is formed in a multilayer, the gap between the pad 2 and the substrate can be made narrow remarkedly compared to a case where the resistor Rp is arranged in the gap between the pad 2 and the substrate. As a result, a further increase in the density of a semiconductor chip and a further increase in the integration of the chip become possible.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15828487A JPS642345A (en) | 1987-06-24 | 1987-06-24 | Semiconductor integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15828487A JPS642345A (en) | 1987-06-24 | 1987-06-24 | Semiconductor integrated circuit device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH012345A JPH012345A (en) | 1989-01-06 |
JPS642345A true JPS642345A (en) | 1989-01-06 |
Family
ID=15668233
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15828487A Pending JPS642345A (en) | 1987-06-24 | 1987-06-24 | Semiconductor integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS642345A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58162258A (en) * | 1982-03-19 | 1983-09-26 | Kao Corp | Making method for liquid spice |
US6703666B1 (en) * | 1999-07-14 | 2004-03-09 | Agere Systems Inc. | Thin film resistor device and a method of manufacture therefor |
NO333523B1 (en) * | 1999-12-23 | 2013-07-01 | Reynolds Metals Co | Aluminum alloys with optimum combinations of moldability, corrosion resistance and heat resistance, and their applications in heat exchangers |
-
1987
- 1987-06-24 JP JP15828487A patent/JPS642345A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58162258A (en) * | 1982-03-19 | 1983-09-26 | Kao Corp | Making method for liquid spice |
JPH0115267B2 (en) * | 1982-03-19 | 1989-03-16 | Kao Corp | |
US6703666B1 (en) * | 1999-07-14 | 2004-03-09 | Agere Systems Inc. | Thin film resistor device and a method of manufacture therefor |
US7276767B2 (en) | 1999-07-14 | 2007-10-02 | Agere Systems Inc. | Thin film resistor device and a method of manufacture therefor |
NO333523B1 (en) * | 1999-12-23 | 2013-07-01 | Reynolds Metals Co | Aluminum alloys with optimum combinations of moldability, corrosion resistance and heat resistance, and their applications in heat exchangers |
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