JPS642243A - Aligning method for electron beam - Google Patents

Aligning method for electron beam

Info

Publication number
JPS642243A
JPS642243A JP62157108A JP15710887A JPS642243A JP S642243 A JPS642243 A JP S642243A JP 62157108 A JP62157108 A JP 62157108A JP 15710887 A JP15710887 A JP 15710887A JP S642243 A JPS642243 A JP S642243A
Authority
JP
Japan
Prior art keywords
electron beam
deflector
aperture
absorption current
deflecting voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62157108A
Other languages
English (en)
Other versions
JPH012243A (ja
JPH0821351B2 (ja
Inventor
Toshihiro Ishizuka
Akio Ito
Kazuyuki Ozaki
Kazuo Okubo
Katsuhiko Tsuchido
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62157108A priority Critical patent/JPH0821351B2/ja
Publication of JPS642243A publication Critical patent/JPS642243A/ja
Publication of JPH012243A publication Critical patent/JPH012243A/ja
Publication of JPH0821351B2 publication Critical patent/JPH0821351B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP62157108A 1987-06-24 1987-06-24 電子ビ−ムのアライメント方法 Expired - Lifetime JPH0821351B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62157108A JPH0821351B2 (ja) 1987-06-24 1987-06-24 電子ビ−ムのアライメント方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62157108A JPH0821351B2 (ja) 1987-06-24 1987-06-24 電子ビ−ムのアライメント方法

Publications (3)

Publication Number Publication Date
JPS642243A true JPS642243A (en) 1989-01-06
JPH012243A JPH012243A (ja) 1989-01-06
JPH0821351B2 JPH0821351B2 (ja) 1996-03-04

Family

ID=15642403

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62157108A Expired - Lifetime JPH0821351B2 (ja) 1987-06-24 1987-06-24 電子ビ−ムのアライメント方法

Country Status (1)

Country Link
JP (1) JPH0821351B2 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0629786A (ja) * 1991-10-08 1994-02-04 Crystal Semiconductor Corp デジタル・インターポレーション用低精度ｆｉｒフィルタ
JPH0766687A (ja) * 1993-08-20 1995-03-10 Nippon Columbia Co Ltd ディジタル信号処理装置
JP2011077180A (ja) * 2009-09-29 2011-04-14 Nuflare Technology Inc 荷電粒子ビーム描画装置及び荷電粒子ビームのアライメント方法
WO2016199738A1 (ja) * 2015-06-08 2016-12-15 株式会社ニコン 荷電粒子ビーム露光装置及びデバイス製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0629786A (ja) * 1991-10-08 1994-02-04 Crystal Semiconductor Corp デジタル・インターポレーション用低精度ｆｉｒフィルタ
JPH0766687A (ja) * 1993-08-20 1995-03-10 Nippon Columbia Co Ltd ディジタル信号処理装置
JP2011077180A (ja) * 2009-09-29 2011-04-14 Nuflare Technology Inc 荷電粒子ビーム描画装置及び荷電粒子ビームのアライメント方法
WO2016199738A1 (ja) * 2015-06-08 2016-12-15 株式会社ニコン 荷電粒子ビーム露光装置及びデバイス製造方法

Also Published As

Publication number Publication date
JPH0821351B2 (ja) 1996-03-04

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