JPS6419614A - Thin film type superconductor - Google Patents

Thin film type superconductor

Info

Publication number
JPS6419614A
JPS6419614A JP62175161A JP17516187A JPS6419614A JP S6419614 A JPS6419614 A JP S6419614A JP 62175161 A JP62175161 A JP 62175161A JP 17516187 A JP17516187 A JP 17516187A JP S6419614 A JPS6419614 A JP S6419614A
Authority
JP
Japan
Prior art keywords
gas
sputtering
film
thin film
film type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62175161A
Other languages
Japanese (ja)
Inventor
Soji Tsuchiya
Takeshi Takeda
Satoshi Sekido
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62175161A priority Critical patent/JPS6419614A/en
Publication of JPS6419614A publication Critical patent/JPS6419614A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Abstract

PURPOSE:To provide a thin film type superconductor having a superconductivity transfer temp. Tc in the same degree as ceramics and with improved stability by preparing the superconductor with a specific sintering as target by means of sputtering in mixture gas atmosphere in which fluoric compound gas is added to argon or argon plus oxygen gas. CONSTITUTION:As atmospheric gas for preparation of a superconductive film by sputtering process, a mixture of fluoric compound gas and Ar or Ar+O2 gas is used, and a film is formed by using a sintering of MBa2Cu3O7-delta (0<delta<1) as sputtering target, where M includes at least one of Y, Lu, Yb, Tm, Er, Ho, Dy, Gd, Sc. As the atmospheric gas for preparation of sputtering film of oxide, fluoric compound gas is added to Ar or Ar+O2 gas, and thereby part of the positions to be occupied by oxygen atoms in a crystal of oxide is substituted by F atoms to accomplish enhancement of Tc of the film and improvement of stability. This enhances Tc of the thin film type superconductor to a one near sintered substance, and the stability is also improved.
JP62175161A 1987-07-14 1987-07-14 Thin film type superconductor Pending JPS6419614A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62175161A JPS6419614A (en) 1987-07-14 1987-07-14 Thin film type superconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62175161A JPS6419614A (en) 1987-07-14 1987-07-14 Thin film type superconductor

Publications (1)

Publication Number Publication Date
JPS6419614A true JPS6419614A (en) 1989-01-23

Family

ID=15991328

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62175161A Pending JPS6419614A (en) 1987-07-14 1987-07-14 Thin film type superconductor

Country Status (1)

Country Link
JP (1) JPS6419614A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01176217A (en) * 1987-12-29 1989-07-12 Sumitomo Electric Ind Ltd Production of superconducting thin film of compound oxide

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01176217A (en) * 1987-12-29 1989-07-12 Sumitomo Electric Ind Ltd Production of superconducting thin film of compound oxide

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