JPS6419622A - Method for forming superconductive ceramic thin film - Google Patents

Method for forming superconductive ceramic thin film

Info

Publication number
JPS6419622A
JPS6419622A JP62173934A JP17393487A JPS6419622A JP S6419622 A JPS6419622 A JP S6419622A JP 62173934 A JP62173934 A JP 62173934A JP 17393487 A JP17393487 A JP 17393487A JP S6419622 A JPS6419622 A JP S6419622A
Authority
JP
Japan
Prior art keywords
ceramic
thin film
contained
metal element
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62173934A
Other languages
Japanese (ja)
Inventor
Masanobu Kobayashi
Mutsumi Asano
Kiminori Maeno
Kayoko Oishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP62173934A priority Critical patent/JPS6419622A/en
Publication of JPS6419622A publication Critical patent/JPS6419622A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Abstract

PURPOSE:To form ceramic thin film presenting stable superconductivity with good reproductivity by selecting either of specific mixtures as target, and performing sputter by the use of oxygen and argon gas. CONSTITUTION:To form superconductive ceramic thin film of ceramics of Y- Ba-Cu-O type etc., either of an alloy of the same composition as the ceramic composing metal ratio, metal element single body contained by the ceramic, and the mixture in desired mix proportion of oxides of metal elements contained by the ceramic is selected as the target, and oxygen and argon gas is used as sputter gas to perform sputtering on a base in the atmosphere as O2/(Ar+O2)=0.2-0.5. As a concrete name for the alloy of the same composition as the ceramic composing metal ratio can be named Y2Ba3Cu5, YBaCu and YBa2Cu3 (atom %) by the example of ceramic of Y-Ba-Cu-O type, and Y, Ba, and Cu for the metal element single body contained by the ceramic, and also Y2O3, BaO, and CuO for oxide of metal element contained by the ceramic. Thus a superconductive film can be formed stably with good reproductivity.
JP62173934A 1987-07-14 1987-07-14 Method for forming superconductive ceramic thin film Pending JPS6419622A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62173934A JPS6419622A (en) 1987-07-14 1987-07-14 Method for forming superconductive ceramic thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62173934A JPS6419622A (en) 1987-07-14 1987-07-14 Method for forming superconductive ceramic thin film

Publications (1)

Publication Number Publication Date
JPS6419622A true JPS6419622A (en) 1989-01-23

Family

ID=15969778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62173934A Pending JPS6419622A (en) 1987-07-14 1987-07-14 Method for forming superconductive ceramic thin film

Country Status (1)

Country Link
JP (1) JPS6419622A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6476618A (en) * 1987-09-16 1989-03-22 Sumitomo Electric Industries Manufacture of composite oxide superconductive thin film
JPH01183495A (en) * 1988-01-14 1989-07-21 Nec Corp Production of single crystal oxide superconducting thin film
JPH02255501A (en) * 1989-03-30 1990-10-16 Nippon Steel Corp Production of oxide superconducting thin film
US5441569A (en) * 1993-11-29 1995-08-15 The United States Of America As Represented By The United States Department Of Energy Apparatus and method for laser deposition of durable coatings
JPH07331430A (en) * 1994-06-08 1995-12-19 Agency Of Ind Science & Technol Production of thermochromic material
US5597424A (en) * 1990-04-13 1997-01-28 Nippon Steel Corporation Process for producing grain oriented electrical steel sheet having excellent magnetic properties

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6476618A (en) * 1987-09-16 1989-03-22 Sumitomo Electric Industries Manufacture of composite oxide superconductive thin film
JPH01183495A (en) * 1988-01-14 1989-07-21 Nec Corp Production of single crystal oxide superconducting thin film
JPH02255501A (en) * 1989-03-30 1990-10-16 Nippon Steel Corp Production of oxide superconducting thin film
US5597424A (en) * 1990-04-13 1997-01-28 Nippon Steel Corporation Process for producing grain oriented electrical steel sheet having excellent magnetic properties
US5441569A (en) * 1993-11-29 1995-08-15 The United States Of America As Represented By The United States Department Of Energy Apparatus and method for laser deposition of durable coatings
JPH07331430A (en) * 1994-06-08 1995-12-19 Agency Of Ind Science & Technol Production of thermochromic material

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