JPS641949B2 - - Google Patents

Info

Publication number
JPS641949B2
JPS641949B2 JP26015384A JP26015384A JPS641949B2 JP S641949 B2 JPS641949 B2 JP S641949B2 JP 26015384 A JP26015384 A JP 26015384A JP 26015384 A JP26015384 A JP 26015384A JP S641949 B2 JPS641949 B2 JP S641949B2
Authority
JP
Japan
Prior art keywords
metal electrode
discharge
electrodes
high voltage
laser device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP26015384A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61137381A (ja
Inventor
Satoru Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP26015384A priority Critical patent/JPS61137381A/ja
Publication of JPS61137381A publication Critical patent/JPS61137381A/ja
Publication of JPS641949B2 publication Critical patent/JPS641949B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
JP26015384A 1984-12-10 1984-12-10 無声放電式ガスレ−ザ装置 Granted JPS61137381A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26015384A JPS61137381A (ja) 1984-12-10 1984-12-10 無声放電式ガスレ−ザ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26015384A JPS61137381A (ja) 1984-12-10 1984-12-10 無声放電式ガスレ−ザ装置

Publications (2)

Publication Number Publication Date
JPS61137381A JPS61137381A (ja) 1986-06-25
JPS641949B2 true JPS641949B2 (enrdf_load_html_response) 1989-01-13

Family

ID=17344045

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26015384A Granted JPS61137381A (ja) 1984-12-10 1984-12-10 無声放電式ガスレ−ザ装置

Country Status (1)

Country Link
JP (1) JPS61137381A (enrdf_load_html_response)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63204677A (ja) * 1987-02-20 1988-08-24 Toshiba Corp エキシマレ−ザ用電極
JP2590086B2 (ja) * 1987-02-20 1997-03-12 株式会社東芝 エキシマレーザ用送風機フィン
JP2590087B2 (ja) * 1987-02-20 1997-03-12 株式会社東芝 エキシマレーザ用熱交換器フィン
JPS63204678A (ja) * 1987-02-20 1988-08-24 Toshiba Corp エキシマレ−ザ管

Also Published As

Publication number Publication date
JPS61137381A (ja) 1986-06-25

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