JPS6418990A - Production of diamond coating film - Google Patents

Production of diamond coating film

Info

Publication number
JPS6418990A
JPS6418990A JP17098587A JP17098587A JPS6418990A JP S6418990 A JPS6418990 A JP S6418990A JP 17098587 A JP17098587 A JP 17098587A JP 17098587 A JP17098587 A JP 17098587A JP S6418990 A JPS6418990 A JP S6418990A
Authority
JP
Japan
Prior art keywords
cathode
gas
coating film
reticulate
hollow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17098587A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0477709B2 (enExample
Inventor
Shizuka Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP17098587A priority Critical patent/JPS6418990A/ja
Publication of JPS6418990A publication Critical patent/JPS6418990A/ja
Publication of JPH0477709B2 publication Critical patent/JPH0477709B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP17098587A 1987-07-10 1987-07-10 Production of diamond coating film Granted JPS6418990A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17098587A JPS6418990A (en) 1987-07-10 1987-07-10 Production of diamond coating film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17098587A JPS6418990A (en) 1987-07-10 1987-07-10 Production of diamond coating film

Publications (2)

Publication Number Publication Date
JPS6418990A true JPS6418990A (en) 1989-01-23
JPH0477709B2 JPH0477709B2 (enExample) 1992-12-09

Family

ID=15914988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17098587A Granted JPS6418990A (en) 1987-07-10 1987-07-10 Production of diamond coating film

Country Status (1)

Country Link
JP (1) JPS6418990A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01309969A (ja) * 1988-06-07 1989-12-14 Fujitsu Ltd 薄膜形成装置
JPH024976A (ja) * 1988-06-23 1990-01-09 Fujitsu Ltd 薄膜形成方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6177697A (ja) * 1984-09-25 1986-04-21 Nec Corp ダイヤモンドの気相合成法とその装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6177697A (ja) * 1984-09-25 1986-04-21 Nec Corp ダイヤモンドの気相合成法とその装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01309969A (ja) * 1988-06-07 1989-12-14 Fujitsu Ltd 薄膜形成装置
JPH024976A (ja) * 1988-06-23 1990-01-09 Fujitsu Ltd 薄膜形成方法

Also Published As

Publication number Publication date
JPH0477709B2 (enExample) 1992-12-09

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