JPS6417868A - Apparatus and method for forming film - Google Patents

Apparatus and method for forming film

Info

Publication number
JPS6417868A
JPS6417868A JP17237387A JP17237387A JPS6417868A JP S6417868 A JPS6417868 A JP S6417868A JP 17237387 A JP17237387 A JP 17237387A JP 17237387 A JP17237387 A JP 17237387A JP S6417868 A JPS6417868 A JP S6417868A
Authority
JP
Japan
Prior art keywords
substrate
alkene
distribution plate
gaseous
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17237387A
Other languages
English (en)
Inventor
Atsushi Sekiguchi
Shinji Takagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP17237387A priority Critical patent/JPS6417868A/ja
Publication of JPS6417868A publication Critical patent/JPS6417868A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP17237387A 1987-07-10 1987-07-10 Apparatus and method for forming film Pending JPS6417868A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17237387A JPS6417868A (en) 1987-07-10 1987-07-10 Apparatus and method for forming film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17237387A JPS6417868A (en) 1987-07-10 1987-07-10 Apparatus and method for forming film

Publications (1)

Publication Number Publication Date
JPS6417868A true JPS6417868A (en) 1989-01-20

Family

ID=15940704

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17237387A Pending JPS6417868A (en) 1987-07-10 1987-07-10 Apparatus and method for forming film

Country Status (1)

Country Link
JP (1) JPS6417868A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02224227A (ja) * 1989-02-25 1990-09-06 Sony Corp 金属シリサイドの成膜方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02224227A (ja) * 1989-02-25 1990-09-06 Sony Corp 金属シリサイドの成膜方法

Similar Documents

Publication Publication Date Title
US4163071A (en) Method for forming hard wear-resistant coatings
TW363086B (en) A CVD apparatus and CVD method
GB2171420A (en) Hard surface coatings for metal in fluidized beds
EP0305917A3 (en) High hardness fine grained tungsten-carbon alloys and process for making same
US4522660A (en) Process for ion nitriding of aluminum or an aluminum alloy and apparatus therefor
JPH0234166B2 (ja)
JPS6417868A (en) Apparatus and method for forming film
US5383980A (en) Process for hardening workpieces in a pulsed plasma discharge
GB2196993A (en) Method and apparatus for thermochemical treatment
JPS5684478A (en) Apparatus for plasma treatment
JP2007246343A (ja) 結晶製造装置
JPS56124437A (en) Gas phase chemical reaction apparatus
US5041305A (en) Process for depositing a silicon carbide coating on a filament
JPS6425984A (en) Formation of deposited film
JPS6325070B2 (ja)
JPS5464033A (en) Drip type carburization furnace
JPS5467377A (en) Plasma processing apparatus
RU2095463C1 (ru) Способ нанесения покрытий на металлические изделия
JPH0657404A (ja) 鋼からなる工作材の硬化法
JPS6484717A (en) Semiconductor thin film vapor growth apparatus
CA2030977A1 (en) Magnesium Treatment Process and Apparatus for Carrying Out This Process
SU668978A1 (ru) Способ цементации стальных деталей
JPS6441211A (en) Semiconductor growth device
JPH03166376A (ja) レーザｃｖｄ法
ES2080416T3 (es) Procedimiento para el tratamiento de aceros y metales refractarios.