JPS6415987A - Photocoupler - Google Patents
PhotocouplerInfo
- Publication number
- JPS6415987A JPS6415987A JP17221487A JP17221487A JPS6415987A JP S6415987 A JPS6415987 A JP S6415987A JP 17221487 A JP17221487 A JP 17221487A JP 17221487 A JP17221487 A JP 17221487A JP S6415987 A JPS6415987 A JP S6415987A
- Authority
- JP
- Japan
- Prior art keywords
- film
- stuck
- emitting diode
- light emitting
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
Abstract
PURPOSE:To enable the highly accurate alignment, and facilitate the high density integration, by constituting an optical isolator type photocoupler wherein a light emitting diode composed of amorphous silicon carbide is stacked on a photo transistor via a transparent insulating film. CONSTITUTION:Since a phototransistor 10 part is identical to a bipolar silicon transistor, it can be completed by defining the respective regions of collector, base and emitter, and forming the respective electrodes 2E, 3E and 4E. Instead of coating with an insulative cover film, a transparent resin film 20, which transmits a light, is stuck, and silicon resin, e.g., is used for the above resin film 20. In order to form a light emitting diode 30 part, an ITO film 31 is stuck by sputtering method, and then an amorphous carbide film is grown by plasma vapor growth method, wherein a substrate is heated at 180 deg.C, reaction gas is introduced at a reduced pressure degree of about 0.4 Torr, and high frequency electric power of 0.1watt/cm<2> is applied for the growth.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17221487A JPS6415987A (en) | 1987-07-09 | 1987-07-09 | Photocoupler |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17221487A JPS6415987A (en) | 1987-07-09 | 1987-07-09 | Photocoupler |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6415987A true JPS6415987A (en) | 1989-01-19 |
Family
ID=15937710
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17221487A Pending JPS6415987A (en) | 1987-07-09 | 1987-07-09 | Photocoupler |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6415987A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6025610A (en) * | 1997-01-23 | 2000-02-15 | Nec Corporation | Solid relay and method of producing the same |
-
1987
- 1987-07-09 JP JP17221487A patent/JPS6415987A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6025610A (en) * | 1997-01-23 | 2000-02-15 | Nec Corporation | Solid relay and method of producing the same |
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