JPS6414850A - Gas phase ion source - Google Patents

Gas phase ion source

Info

Publication number
JPS6414850A
JPS6414850A JP17043187A JP17043187A JPS6414850A JP S6414850 A JPS6414850 A JP S6414850A JP 17043187 A JP17043187 A JP 17043187A JP 17043187 A JP17043187 A JP 17043187A JP S6414850 A JPS6414850 A JP S6414850A
Authority
JP
Japan
Prior art keywords
gas
refrigerant
emitter
pipe
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17043187A
Other languages
Japanese (ja)
Inventor
Ryuzo Aihara
Tadayoshi Nagafune
Yoshizo Sakuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP17043187A priority Critical patent/JPS6414850A/en
Publication of JPS6414850A publication Critical patent/JPS6414850A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0802—Field ionization sources
    • H01J2237/0807—Gas field ion sources [GFIS]

Landscapes

  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To facilitate cooling a helium gas to a liquid helium temperature level without any use of a heat exchanger by leading a pipe into a refrigerant or around the outside wall of a tank and cooling a gas in the pipe. CONSTITUTION:A pipe 11 is so constituted as to be immersed in a refrigerant 3, thereby being cooled by a refrigerant 2 for cooling an emitter 8. Even if a helium gas of ordinary temperature is introduced to a space inside the outside wall 1 of an ion source directly without installation of an independent heat exchanger, therefore, a gas is cooled down to the liquid helium temperature level when passing a space within a tank 2. And the gas is introduced to the inside of a support cylinder 10 of the neighborhood of an emitter 8 via gas passages 17a and 17b after expansion to the predetermined pressure level through a throttle 18. The temperature of the emitter 8 can be thereby kept at the liquid helium temperature level.
JP17043187A 1987-07-08 1987-07-08 Gas phase ion source Pending JPS6414850A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17043187A JPS6414850A (en) 1987-07-08 1987-07-08 Gas phase ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17043187A JPS6414850A (en) 1987-07-08 1987-07-08 Gas phase ion source

Publications (1)

Publication Number Publication Date
JPS6414850A true JPS6414850A (en) 1989-01-19

Family

ID=15904789

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17043187A Pending JPS6414850A (en) 1987-07-08 1987-07-08 Gas phase ion source

Country Status (1)

Country Link
JP (1) JPS6414850A (en)

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