JPS6414850A - Gas phase ion source - Google Patents
Gas phase ion sourceInfo
- Publication number
- JPS6414850A JPS6414850A JP62170431A JP17043187A JPS6414850A JP S6414850 A JPS6414850 A JP S6414850A JP 62170431 A JP62170431 A JP 62170431A JP 17043187 A JP17043187 A JP 17043187A JP S6414850 A JPS6414850 A JP S6414850A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- refrigerant
- emitter
- pipe
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 abstract 6
- 239000001307 helium Substances 0.000 abstract 5
- 229910052734 helium Inorganic materials 0.000 abstract 5
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 abstract 5
- 238000001816 cooling Methods 0.000 abstract 3
- 239000007788 liquid Substances 0.000 abstract 3
- 239000003507 refrigerant Substances 0.000 abstract 3
- 238000009434 installation Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/08—Ion sources
- H01J2237/0802—Field ionization sources
- H01J2237/0807—Gas field ion sources [GFIS]
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
PURPOSE:To facilitate cooling a helium gas to a liquid helium temperature level without any use of a heat exchanger by leading a pipe into a refrigerant or around the outside wall of a tank and cooling a gas in the pipe. CONSTITUTION:A pipe 11 is so constituted as to be immersed in a refrigerant 3, thereby being cooled by a refrigerant 2 for cooling an emitter 8. Even if a helium gas of ordinary temperature is introduced to a space inside the outside wall 1 of an ion source directly without installation of an independent heat exchanger, therefore, a gas is cooled down to the liquid helium temperature level when passing a space within a tank 2. And the gas is introduced to the inside of a support cylinder 10 of the neighborhood of an emitter 8 via gas passages 17a and 17b after expansion to the predetermined pressure level through a throttle 18. The temperature of the emitter 8 can be thereby kept at the liquid helium temperature level.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62170431A JPS6414850A (en) | 1987-07-08 | 1987-07-08 | Gas phase ion source |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62170431A JPS6414850A (en) | 1987-07-08 | 1987-07-08 | Gas phase ion source |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6414850A true JPS6414850A (en) | 1989-01-19 |
Family
ID=15904789
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62170431A Pending JPS6414850A (en) | 1987-07-08 | 1987-07-08 | Gas phase ion source |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6414850A (en) |
-
1987
- 1987-07-08 JP JP62170431A patent/JPS6414850A/en active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB945223A (en) | Improvements in or relating to refrigerators | |
FR2785034B1 (en) | PROCESS FOR ELIMINATE THE EVAPORATION OF A LIQUEFIED GAS STORED IN A WATERPROOF AND ISOTHERMAL TANK, AND DEVICE FOR ITS IMPLEMENTATION | |
GB1335996A (en) | Heat-transfer device | |
GB1458334A (en) | Method for the production of helium 2 under pressure at very low temperature and to an apparatus for carrying out said method | |
ES8201302A1 (en) | Process and installation for reheating a cold fluid. | |
JPS6414850A (en) | Gas phase ion source | |
GB1433727A (en) | Method for reducing fluid losses from a cryostat | |
GB1604421A (en) | Heat transfer apparatus | |
JPS5789279A (en) | Inserting tube for cryostat | |
JPS6419652A (en) | Gas phase ion source | |
JPS5632025A (en) | Cooling system for internal-combustion engine for automobile | |
KR20000020506A (en) | Low-temperature magnetic presser | |
JPS5457257A (en) | Condensor for refrigerator | |
SU985692A1 (en) | Heat ebchanger | |
FR2400674A1 (en) | Heat pump with compressor for heating system - has closed refrigerant and secondary circuit with additional vessel to mount evaporator | |
JPS54137596A (en) | Atomic reactor control rod driving hydraulic system | |
JPS6458992A (en) | Heat transfer apparatus | |
JPS5469861A (en) | Absorption refrigerator | |
JPS569680A (en) | Reduction in electric power required of compressor | |
SU890039A1 (en) | Apparatus for cooling objects | |
SU711315A1 (en) | Vessel for cryogenic liquids | |
JPS6281797U (en) | ||
JPS6410178A (en) | Sample cold insulation device | |
JPS576196A (en) | Low temperature liquid gas tank | |
JPS6410549A (en) | Gas phase ion source |