JPS6410549A - Gas phase ion source - Google Patents

Gas phase ion source

Info

Publication number
JPS6410549A
JPS6410549A JP62166556A JP16655687A JPS6410549A JP S6410549 A JPS6410549 A JP S6410549A JP 62166556 A JP62166556 A JP 62166556A JP 16655687 A JP16655687 A JP 16655687A JP S6410549 A JPS6410549 A JP S6410549A
Authority
JP
Japan
Prior art keywords
gas
ion source
temperature
sapphire
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62166556A
Other languages
Japanese (ja)
Inventor
Haruo Kasahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP62166556A priority Critical patent/JPS6410549A/en
Publication of JPS6410549A publication Critical patent/JPS6410549A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0802—Field ionization sources
    • H01J2237/0807—Gas field ion sources [GFIS]

Landscapes

  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To make it possible to cool helium gas nearly to the temperature of liquid helium with a simple structure using no heat exchanger by cooling the said gas with an electric insulator in the inner portion or on the periphery of which a gas flow path is provided. CONSTITUTION:A pipe 11 inserted in the outer wall 1 of an ion source is fitted in a groove 15 provided on the periphery of a sapphire 6. Thus the pipe 11 is cooled by the sapphire 6 kept at the temperature of liquid helium. Therfore even when helium gas in room temperature is introduced directly into the envelope 1 of an ion source through no heat exchanger in the atmosphere, the said gas can be cooled nearly to the temperature of liquid helium by passing through the pipe on the sapphire 6.
JP62166556A 1987-07-03 1987-07-03 Gas phase ion source Pending JPS6410549A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62166556A JPS6410549A (en) 1987-07-03 1987-07-03 Gas phase ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62166556A JPS6410549A (en) 1987-07-03 1987-07-03 Gas phase ion source

Publications (1)

Publication Number Publication Date
JPS6410549A true JPS6410549A (en) 1989-01-13

Family

ID=15833450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62166556A Pending JPS6410549A (en) 1987-07-03 1987-07-03 Gas phase ion source

Country Status (1)

Country Link
JP (1) JPS6410549A (en)

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