JPS6413744A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS6413744A JPS6413744A JP62170202A JP17020287A JPS6413744A JP S6413744 A JPS6413744 A JP S6413744A JP 62170202 A JP62170202 A JP 62170202A JP 17020287 A JP17020287 A JP 17020287A JP S6413744 A JPS6413744 A JP S6413744A
- Authority
- JP
- Japan
- Prior art keywords
- conductive material
- groove
- substrate
- separated
- embedded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Memories (AREA)
Abstract
PURPOSE:To make a device capable of delivering a potential to an embedded electrode without photoetching at the time of taking the embedded electrode out by forming the first conductive material which is embedded in a groove, and connecting the first and second conductive materials through a contact hole formed right above the groove. CONSTITUTION:A connecting section which delivers a potential to a plate electrode 105 has a square theta-shape in plane view, and a contact hole 131 is formed onto a groove of a part linking one side of a square theta-shaped groove 132 with the facing side thereagainst. When taking a contact for the conductive material 105 from another conductive material 133 formed onto the groove 132 opened on a substrate 100, the conductive material 105 makes contact with a conductive material 103 in the side wall of the groove as well as the Si substrate 100 itself. They must be separated electrically as well as in terms of pattern. The conductive material 103 located on the side wall of the groove, which is always left unpatterned, is separated from other circuits in terms of pattern. Then, the connecting section between the conductive material 133 and the substrate 100 is electrically separated by implanting impurities thereinto.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62170202A JPH0795569B2 (en) | 1987-07-08 | 1987-07-08 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62170202A JPH0795569B2 (en) | 1987-07-08 | 1987-07-08 | Semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6413744A true JPS6413744A (en) | 1989-01-18 |
JPH0795569B2 JPH0795569B2 (en) | 1995-10-11 |
Family
ID=15900560
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62170202A Expired - Fee Related JPH0795569B2 (en) | 1987-07-08 | 1987-07-08 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0795569B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5196373A (en) * | 1990-08-06 | 1993-03-23 | Harris Corporation | Method of making trench conductor and crossunder architecture |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61288461A (en) * | 1985-06-17 | 1986-12-18 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of semiconductor device |
JPS632373A (en) * | 1986-06-23 | 1988-01-07 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor device |
-
1987
- 1987-07-08 JP JP62170202A patent/JPH0795569B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61288461A (en) * | 1985-06-17 | 1986-12-18 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of semiconductor device |
JPS632373A (en) * | 1986-06-23 | 1988-01-07 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5196373A (en) * | 1990-08-06 | 1993-03-23 | Harris Corporation | Method of making trench conductor and crossunder architecture |
Also Published As
Publication number | Publication date |
---|---|
JPH0795569B2 (en) | 1995-10-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |