JPS52141591A - Process of semiconductor device - Google Patents
Process of semiconductor deviceInfo
- Publication number
- JPS52141591A JPS52141591A JP5866376A JP5866376A JPS52141591A JP S52141591 A JPS52141591 A JP S52141591A JP 5866376 A JP5866376 A JP 5866376A JP 5866376 A JP5866376 A JP 5866376A JP S52141591 A JPS52141591 A JP S52141591A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- strides
- shorting
- undercut
- wirings
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To make it possible to form a contact hole which strides the gate electrode and source area easily, by filling up clearances caused in gate oxide film by undercut with a liquid insulating material, so that shorting with other wirings are eliminated and the manufacturing yield is improved.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5866376A JPS52141591A (en) | 1976-05-20 | 1976-05-20 | Process of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5866376A JPS52141591A (en) | 1976-05-20 | 1976-05-20 | Process of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52141591A true JPS52141591A (en) | 1977-11-25 |
Family
ID=13090817
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5866376A Pending JPS52141591A (en) | 1976-05-20 | 1976-05-20 | Process of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52141591A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5519857A (en) * | 1978-07-28 | 1980-02-12 | Nec Corp | Semiconductor |
JPS5737855A (en) * | 1980-08-19 | 1982-03-02 | Nec Corp | Semiconductor device |
JPS57201050A (en) * | 1981-06-05 | 1982-12-09 | Seiko Epson Corp | Multilayer wiring structure |
JPS61198653A (en) * | 1985-11-15 | 1986-09-03 | Nec Corp | Manufacture of semiconductor device |
JPS63107046A (en) * | 1987-02-04 | 1988-05-12 | Nec Corp | Manufacture of semiconductor device |
-
1976
- 1976-05-20 JP JP5866376A patent/JPS52141591A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5519857A (en) * | 1978-07-28 | 1980-02-12 | Nec Corp | Semiconductor |
JPS5737855A (en) * | 1980-08-19 | 1982-03-02 | Nec Corp | Semiconductor device |
JPS57201050A (en) * | 1981-06-05 | 1982-12-09 | Seiko Epson Corp | Multilayer wiring structure |
JPS61198653A (en) * | 1985-11-15 | 1986-09-03 | Nec Corp | Manufacture of semiconductor device |
JPH025297B2 (en) * | 1985-11-15 | 1990-02-01 | Nippon Electric Co | |
JPS63107046A (en) * | 1987-02-04 | 1988-05-12 | Nec Corp | Manufacture of semiconductor device |
JPH0365654B2 (en) * | 1987-02-04 | 1991-10-14 |
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