JPS52141591A - Process of semiconductor device - Google Patents

Process of semiconductor device

Info

Publication number
JPS52141591A
JPS52141591A JP5866376A JP5866376A JPS52141591A JP S52141591 A JPS52141591 A JP S52141591A JP 5866376 A JP5866376 A JP 5866376A JP 5866376 A JP5866376 A JP 5866376A JP S52141591 A JPS52141591 A JP S52141591A
Authority
JP
Japan
Prior art keywords
semiconductor device
strides
shorting
undercut
wirings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5866376A
Other languages
Japanese (ja)
Inventor
Masanori Fukumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5866376A priority Critical patent/JPS52141591A/en
Publication of JPS52141591A publication Critical patent/JPS52141591A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To make it possible to form a contact hole which strides the gate electrode and source area easily, by filling up clearances caused in gate oxide film by undercut with a liquid insulating material, so that shorting with other wirings are eliminated and the manufacturing yield is improved.
COPYRIGHT: (C)1977,JPO&Japio
JP5866376A 1976-05-20 1976-05-20 Process of semiconductor device Pending JPS52141591A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5866376A JPS52141591A (en) 1976-05-20 1976-05-20 Process of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5866376A JPS52141591A (en) 1976-05-20 1976-05-20 Process of semiconductor device

Publications (1)

Publication Number Publication Date
JPS52141591A true JPS52141591A (en) 1977-11-25

Family

ID=13090817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5866376A Pending JPS52141591A (en) 1976-05-20 1976-05-20 Process of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52141591A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5519857A (en) * 1978-07-28 1980-02-12 Nec Corp Semiconductor
JPS5737855A (en) * 1980-08-19 1982-03-02 Nec Corp Semiconductor device
JPS57201050A (en) * 1981-06-05 1982-12-09 Seiko Epson Corp Multilayer wiring structure
JPS61198653A (en) * 1985-11-15 1986-09-03 Nec Corp Manufacture of semiconductor device
JPS63107046A (en) * 1987-02-04 1988-05-12 Nec Corp Manufacture of semiconductor device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5519857A (en) * 1978-07-28 1980-02-12 Nec Corp Semiconductor
JPS5737855A (en) * 1980-08-19 1982-03-02 Nec Corp Semiconductor device
JPS57201050A (en) * 1981-06-05 1982-12-09 Seiko Epson Corp Multilayer wiring structure
JPS61198653A (en) * 1985-11-15 1986-09-03 Nec Corp Manufacture of semiconductor device
JPH025297B2 (en) * 1985-11-15 1990-02-01 Nippon Electric Co
JPS63107046A (en) * 1987-02-04 1988-05-12 Nec Corp Manufacture of semiconductor device
JPH0365654B2 (en) * 1987-02-04 1991-10-14

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