JPS6413731A - Lift-off flatting method - Google Patents

Lift-off flatting method

Info

Publication number
JPS6413731A
JPS6413731A JP16878887A JP16878887A JPS6413731A JP S6413731 A JPS6413731 A JP S6413731A JP 16878887 A JP16878887 A JP 16878887A JP 16878887 A JP16878887 A JP 16878887A JP S6413731 A JPS6413731 A JP S6413731A
Authority
JP
Japan
Prior art keywords
substrate
positive type
type photoresist
film
niobium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16878887A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0319697B2 (enrdf_load_stackoverflow
Inventor
Ichiro Ishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP16878887A priority Critical patent/JPS6413731A/ja
Publication of JPS6413731A publication Critical patent/JPS6413731A/ja
Publication of JPH0319697B2 publication Critical patent/JPH0319697B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP16878887A 1987-07-08 1987-07-08 Lift-off flatting method Granted JPS6413731A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16878887A JPS6413731A (en) 1987-07-08 1987-07-08 Lift-off flatting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16878887A JPS6413731A (en) 1987-07-08 1987-07-08 Lift-off flatting method

Publications (2)

Publication Number Publication Date
JPS6413731A true JPS6413731A (en) 1989-01-18
JPH0319697B2 JPH0319697B2 (enrdf_load_stackoverflow) 1991-03-15

Family

ID=15874481

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16878887A Granted JPS6413731A (en) 1987-07-08 1987-07-08 Lift-off flatting method

Country Status (1)

Country Link
JP (1) JPS6413731A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003032092A1 (en) * 2001-10-05 2003-04-17 The Regents Of The University Of Michigan Planarizing recess etch

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003032092A1 (en) * 2001-10-05 2003-04-17 The Regents Of The University Of Michigan Planarizing recess etch

Also Published As

Publication number Publication date
JPH0319697B2 (enrdf_load_stackoverflow) 1991-03-15

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term