JPS6411887B2 - - Google Patents
Info
- Publication number
- JPS6411887B2 JPS6411887B2 JP11583579A JP11583579A JPS6411887B2 JP S6411887 B2 JPS6411887 B2 JP S6411887B2 JP 11583579 A JP11583579 A JP 11583579A JP 11583579 A JP11583579 A JP 11583579A JP S6411887 B2 JPS6411887 B2 JP S6411887B2
- Authority
- JP
- Japan
- Prior art keywords
- chart
- image
- solid
- elements
- state scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 14
- 238000007689 inspection Methods 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 6
- 238000012360 testing method Methods 0.000 description 18
- 238000000034 method Methods 0.000 description 10
- 230000007246 mechanism Effects 0.000 description 8
- 238000005259 measurement Methods 0.000 description 6
- 230000005855 radiation Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000002123 temporal effect Effects 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0292—Testing optical properties of objectives by measuring the optical modulation transfer function
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11583579A JPS5640738A (en) | 1979-09-10 | 1979-09-10 | Mft inspection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11583579A JPS5640738A (en) | 1979-09-10 | 1979-09-10 | Mft inspection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5640738A JPS5640738A (en) | 1981-04-17 |
| JPS6411887B2 true JPS6411887B2 (enExample) | 1989-02-27 |
Family
ID=14672290
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11583579A Granted JPS5640738A (en) | 1979-09-10 | 1979-09-10 | Mft inspection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5640738A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58186454U (ja) * | 1982-06-07 | 1983-12-10 | 株式会社リコー | Ｍｔｆ測定装置 |
| CN105675266B (zh) * | 2016-02-03 | 2018-06-26 | 上海仪万光电科技有限公司 | 无限共轭光路测量光学镜头的调制传递函数的装置及方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54107758A (en) * | 1978-02-10 | 1979-08-23 | Asahi Optical Co Ltd | Lens efficiency determining system |
-
1979
- 1979-09-10 JP JP11583579A patent/JPS5640738A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5640738A (en) | 1981-04-17 |
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