JPS5640738A - Mft inspection device - Google Patents

Mft inspection device

Info

Publication number
JPS5640738A
JPS5640738A JP11583579A JP11583579A JPS5640738A JP S5640738 A JPS5640738 A JP S5640738A JP 11583579 A JP11583579 A JP 11583579A JP 11583579 A JP11583579 A JP 11583579A JP S5640738 A JPS5640738 A JP S5640738A
Authority
JP
Japan
Prior art keywords
image
solid scanning
scanning element
test chart
solid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11583579A
Other languages
Japanese (ja)
Other versions
JPS6411887B2 (en
Inventor
Taira Kochiwa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP11583579A priority Critical patent/JPS5640738A/en
Publication of JPS5640738A publication Critical patent/JPS5640738A/en
Publication of JPS6411887B2 publication Critical patent/JPS6411887B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0292—Testing optical properties of objectives by measuring the optical modulation transfer function

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

PURPOSE:To exclude mechanical scanning part and to quicken the inspection speed, by using the solid scanning element as the photodetector of the device measuring the transfer function of the optical element. CONSTITUTION:On the substrate 16 in which the center is in agreement with the light axis and the rotation is possible, the solid scanning element 171 is located for the signal detection of the test chart image and the solid scanning elements 172- 175 which are twice the number of image heights, are located for the signal detection of the test chart image of each image height. Each solid scanning element detects the signals of the test chart image of tangential or radial direction of each image height on the same radiation (a), (b) or of the same image height. Further, by rotating the substrate 16, the measurement is made at an arbitrary position. The detection signal from the solid scanning element is processed electrically to measure the trasfer function (MTF) of the optical elements.
JP11583579A 1979-09-10 1979-09-10 Mft inspection device Granted JPS5640738A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11583579A JPS5640738A (en) 1979-09-10 1979-09-10 Mft inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11583579A JPS5640738A (en) 1979-09-10 1979-09-10 Mft inspection device

Publications (2)

Publication Number Publication Date
JPS5640738A true JPS5640738A (en) 1981-04-17
JPS6411887B2 JPS6411887B2 (en) 1989-02-27

Family

ID=14672290

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11583579A Granted JPS5640738A (en) 1979-09-10 1979-09-10 Mft inspection device

Country Status (1)

Country Link
JP (1) JPS5640738A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58186454U (en) * 1982-06-07 1983-12-10 株式会社リコー MTF measuring device
CN105675266A (en) * 2016-02-03 2016-06-15 上海仪万光电科技有限公司 Device and method for measuring modulation transfer function of optical lens based on infinite conjugate optical path

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54107758A (en) * 1978-02-10 1979-08-23 Asahi Optical Co Ltd Lens efficiency determining system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54107758A (en) * 1978-02-10 1979-08-23 Asahi Optical Co Ltd Lens efficiency determining system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58186454U (en) * 1982-06-07 1983-12-10 株式会社リコー MTF measuring device
CN105675266A (en) * 2016-02-03 2016-06-15 上海仪万光电科技有限公司 Device and method for measuring modulation transfer function of optical lens based on infinite conjugate optical path
CN105675266B (en) * 2016-02-03 2018-06-26 上海仪万光电科技有限公司 Infinite conjugate optical path measures the device and method of the modulation transfer function of optical lens

Also Published As

Publication number Publication date
JPS6411887B2 (en) 1989-02-27

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