JPS6411347B2 - - Google Patents
Info
- Publication number
- JPS6411347B2 JPS6411347B2 JP15780A JP15780A JPS6411347B2 JP S6411347 B2 JPS6411347 B2 JP S6411347B2 JP 15780 A JP15780 A JP 15780A JP 15780 A JP15780 A JP 15780A JP S6411347 B2 JPS6411347 B2 JP S6411347B2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum atmosphere
- vacuum
- fine particles
- electron emitting
- particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002245 particle Substances 0.000 claims description 6
- 238000000746 purification Methods 0.000 claims description 3
- 239000010419 fine particle Substances 0.000 description 8
- 238000009792 diffusion process Methods 0.000 description 3
- 108010083687 Ion Pumps Proteins 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 102000006391 Ion Pumps Human genes 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Electrostatic Separation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15780A JPS56111058A (en) | 1980-01-07 | 1980-01-07 | Vacuum purification device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15780A JPS56111058A (en) | 1980-01-07 | 1980-01-07 | Vacuum purification device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56111058A JPS56111058A (en) | 1981-09-02 |
JPS6411347B2 true JPS6411347B2 (ko) | 1989-02-23 |
Family
ID=11466199
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15780A Granted JPS56111058A (en) | 1980-01-07 | 1980-01-07 | Vacuum purification device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56111058A (ko) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63185465A (ja) * | 1987-01-28 | 1988-08-01 | Matsushita Electric Ind Co Ltd | 集塵装置 |
JPH0243962A (ja) * | 1988-08-01 | 1990-02-14 | Anelva Corp | 真空処理装置の集塵装置 |
JPH0744672U (ja) * | 1995-05-08 | 1995-11-28 | 日電アネルバ株式会社 | 真空処理装置の集塵装置 |
KR101008065B1 (ko) | 2008-09-08 | 2011-01-13 | 고병모 | 복사압을 이용한 진공펌프 |
-
1980
- 1980-01-07 JP JP15780A patent/JPS56111058A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS56111058A (en) | 1981-09-02 |
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