JPS6411330A - Taper etching - Google Patents
Taper etchingInfo
- Publication number
- JPS6411330A JPS6411330A JP16720387A JP16720387A JPS6411330A JP S6411330 A JPS6411330 A JP S6411330A JP 16720387 A JP16720387 A JP 16720387A JP 16720387 A JP16720387 A JP 16720387A JP S6411330 A JPS6411330 A JP S6411330A
- Authority
- JP
- Japan
- Prior art keywords
- etched
- layer
- ultraviolet rays
- intensity
- resist layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16720387A JPS6411330A (en) | 1987-07-03 | 1987-07-03 | Taper etching |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16720387A JPS6411330A (en) | 1987-07-03 | 1987-07-03 | Taper etching |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6411330A true JPS6411330A (en) | 1989-01-13 |
Family
ID=15845334
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16720387A Pending JPS6411330A (en) | 1987-07-03 | 1987-07-03 | Taper etching |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6411330A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6139457A (en) * | 1994-03-03 | 2000-10-31 | Kabushiki Kaisha Kanemitsu | Sheet metal pulley |
JP2007154913A (ja) * | 2005-11-30 | 2007-06-21 | Nissan Diesel Motor Co Ltd | 動力伝達装置 |
-
1987
- 1987-07-03 JP JP16720387A patent/JPS6411330A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6139457A (en) * | 1994-03-03 | 2000-10-31 | Kabushiki Kaisha Kanemitsu | Sheet metal pulley |
JP2007154913A (ja) * | 2005-11-30 | 2007-06-21 | Nissan Diesel Motor Co Ltd | 動力伝達装置 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS56122129A (en) | Manufacture of semiconductor device | |
JPS6411330A (en) | Taper etching | |
JPS54148484A (en) | Manufacture of semiconductor wafer test device | |
JPS5324277A (en) | Semiconductor devic e and its production | |
JPS6438701A (en) | Non-reflection treated substrate | |
JPS57174466A (en) | Dry etching method | |
JPS57130431A (en) | Manufacture of semiconductor device | |
JPS56100420A (en) | Plasma etching method for oxidized silicon film | |
JPS5623752A (en) | Manufacture of semiconductor device | |
JPS5224084A (en) | Semiconductor manufacturing rpocess | |
JPS55164077A (en) | Method for etching by gas plasma | |
JPS6459820A (en) | Dry etching | |
JPS56103424A (en) | Plasma etching method | |
JPS5655055A (en) | Manufacture of semiconductor device | |
JPS5569263A (en) | Dry etching process | |
JPS6466939A (en) | Manufacture of semiconductor device | |
JPS51112277A (en) | Semiconductor device and its production method | |
JPS6420624A (en) | Manufacture of semiconductor device | |
JPS649619A (en) | Manufacture of semiconductor device | |
JPS5718320A (en) | Production of semiconductor device | |
JPS5711450A (en) | Manufacture of fluorescent display tube | |
JPS6417443A (en) | Manufacture of semiconductor device | |
JPS54101273A (en) | Manufacture for semiconductor device | |
JPS57102010A (en) | Manufacture of semiconductor device | |
JPS5518004A (en) | Etching |