JPS6411330A - Taper etching - Google Patents

Taper etching

Info

Publication number
JPS6411330A
JPS6411330A JP16720387A JP16720387A JPS6411330A JP S6411330 A JPS6411330 A JP S6411330A JP 16720387 A JP16720387 A JP 16720387A JP 16720387 A JP16720387 A JP 16720387A JP S6411330 A JPS6411330 A JP S6411330A
Authority
JP
Japan
Prior art keywords
etched
layer
ultraviolet rays
intensity
resist layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16720387A
Other languages
English (en)
Inventor
Yoji Masuda
Masabumi Kubota
Hiroshi Imai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP16720387A priority Critical patent/JPS6411330A/ja
Publication of JPS6411330A publication Critical patent/JPS6411330A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP16720387A 1987-07-03 1987-07-03 Taper etching Pending JPS6411330A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16720387A JPS6411330A (en) 1987-07-03 1987-07-03 Taper etching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16720387A JPS6411330A (en) 1987-07-03 1987-07-03 Taper etching

Publications (1)

Publication Number Publication Date
JPS6411330A true JPS6411330A (en) 1989-01-13

Family

ID=15845334

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16720387A Pending JPS6411330A (en) 1987-07-03 1987-07-03 Taper etching

Country Status (1)

Country Link
JP (1) JPS6411330A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6139457A (en) * 1994-03-03 2000-10-31 Kabushiki Kaisha Kanemitsu Sheet metal pulley
JP2007154913A (ja) * 2005-11-30 2007-06-21 Nissan Diesel Motor Co Ltd 動力伝達装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6139457A (en) * 1994-03-03 2000-10-31 Kabushiki Kaisha Kanemitsu Sheet metal pulley
JP2007154913A (ja) * 2005-11-30 2007-06-21 Nissan Diesel Motor Co Ltd 動力伝達装置

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