JPS641046B2 - - Google Patents
Info
- Publication number
- JPS641046B2 JPS641046B2 JP4858281A JP4858281A JPS641046B2 JP S641046 B2 JPS641046 B2 JP S641046B2 JP 4858281 A JP4858281 A JP 4858281A JP 4858281 A JP4858281 A JP 4858281A JP S641046 B2 JPS641046 B2 JP S641046B2
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- wafer
- energy
- energy beam
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Recrystallisation Techniques (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4858281A JPS57162433A (en) | 1981-03-31 | 1981-03-31 | Scanning method for energy beam |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4858281A JPS57162433A (en) | 1981-03-31 | 1981-03-31 | Scanning method for energy beam |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57162433A JPS57162433A (en) | 1982-10-06 |
| JPS641046B2 true JPS641046B2 (enrdf_load_stackoverflow) | 1989-01-10 |
Family
ID=12807385
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4858281A Granted JPS57162433A (en) | 1981-03-31 | 1981-03-31 | Scanning method for energy beam |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57162433A (enrdf_load_stackoverflow) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58176929A (ja) * | 1982-04-09 | 1983-10-17 | Fujitsu Ltd | 半導体装置の製造方法 |
| JP4667334B2 (ja) * | 1994-07-22 | 2011-04-13 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JP3871725B2 (ja) * | 1994-07-22 | 2007-01-24 | 株式会社半導体エネルギー研究所 | レーザー処理方法 |
| US6300176B1 (en) | 1994-07-22 | 2001-10-09 | Semiconductor Energy Laboratory Co., Ltd. | Laser processing method |
| TW406861U (en) | 1994-07-28 | 2000-09-21 | Semiconductor Energy Lab | Laser processing system |
| JP3535241B2 (ja) * | 1994-11-18 | 2004-06-07 | 株式会社半導体エネルギー研究所 | 半導体デバイス及びその作製方法 |
-
1981
- 1981-03-31 JP JP4858281A patent/JPS57162433A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57162433A (en) | 1982-10-06 |
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