JPS6399750U - - Google Patents
Info
- Publication number
- JPS6399750U JPS6399750U JP19606286U JP19606286U JPS6399750U JP S6399750 U JPS6399750 U JP S6399750U JP 19606286 U JP19606286 U JP 19606286U JP 19606286 U JP19606286 U JP 19606286U JP S6399750 U JPS6399750 U JP S6399750U
- Authority
- JP
- Japan
- Prior art keywords
- proton beam
- sample
- vacuum
- shutter
- ultra
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005211 surface analysis Methods 0.000 claims description 3
- 230000001133 acceleration Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 9
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000005381 potential energy Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19606286U JPS6399750U (enrdf_load_stackoverflow) | 1986-12-19 | 1986-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19606286U JPS6399750U (enrdf_load_stackoverflow) | 1986-12-19 | 1986-12-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6399750U true JPS6399750U (enrdf_load_stackoverflow) | 1988-06-28 |
Family
ID=31154531
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19606286U Pending JPS6399750U (enrdf_load_stackoverflow) | 1986-12-19 | 1986-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6399750U (enrdf_load_stackoverflow) |
-
1986
- 1986-12-19 JP JP19606286U patent/JPS6399750U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0488067A2 (en) | Ion-scattering spectrometer | |
| JP3840558B2 (ja) | 同時検出同位体比質量分析計 | |
| JPH09171083A (ja) | 荷電粒子検出器およびこれを使用した質量分析計 | |
| US6614019B2 (en) | Mass spectrometry detector | |
| JPS6399750U (enrdf_load_stackoverflow) | ||
| CN110703293B (zh) | 一种单个离子实时监测装置及方法 | |
| US5032723A (en) | Charged particle energy analyzer | |
| US5182453A (en) | Ion scattering spectrometer | |
| JP4245785B2 (ja) | 平行磁場型ラザフォード後方散乱分析装置 | |
| JP3273844B2 (ja) | 散乱イオンによる分析装置 | |
| JPS6399751U (enrdf_load_stackoverflow) | ||
| JPH0160452U (enrdf_load_stackoverflow) | ||
| JPS6399665U (enrdf_load_stackoverflow) | ||
| JPS63150845A (ja) | 表面解析装置 | |
| JPH0748373B2 (ja) | 飛行時間型粒子分析装置 | |
| JPH08136481A (ja) | 試料分析装置 | |
| JPH08220030A (ja) | 表面分析方法およびその表面分析装置 | |
| JPH02126550A (ja) | 表面解析装置 | |
| JPS63106055U (enrdf_load_stackoverflow) | ||
| JPS6412370U (enrdf_load_stackoverflow) | ||
| SU1101927A1 (ru) | Двухканальный приемник излучени | |
| SU1753381A1 (ru) | Устройство дл анализа состава и распределени примесей в твердом теле | |
| JPH03285244A (ja) | イオン散乱分析装置 | |
| JP2010223921A (ja) | 散乱イオン分析装置 | |
| JPH05129000A (ja) | 直衝突イオン散乱分光用イオン銃 |