JPH0160452U - - Google Patents
Info
- Publication number
- JPH0160452U JPH0160452U JP15498187U JP15498187U JPH0160452U JP H0160452 U JPH0160452 U JP H0160452U JP 15498187 U JP15498187 U JP 15498187U JP 15498187 U JP15498187 U JP 15498187U JP H0160452 U JPH0160452 U JP H0160452U
- Authority
- JP
- Japan
- Prior art keywords
- proton beam
- sample
- vacuum
- current
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 claims description 5
- 238000005211 surface analysis Methods 0.000 claims description 5
- 239000012212 insulator Substances 0.000 claims description 3
- 230000001133 acceleration Effects 0.000 claims description 2
- 239000011810 insulating material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15498187U JPH0622916Y2 (ja) | 1987-10-09 | 1987-10-09 | 表面解析装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15498187U JPH0622916Y2 (ja) | 1987-10-09 | 1987-10-09 | 表面解析装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0160452U true JPH0160452U (enrdf_load_stackoverflow) | 1989-04-17 |
| JPH0622916Y2 JPH0622916Y2 (ja) | 1994-06-15 |
Family
ID=31432194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15498187U Expired - Lifetime JPH0622916Y2 (ja) | 1987-10-09 | 1987-10-09 | 表面解析装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0622916Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-10-09 JP JP15498187U patent/JPH0622916Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0622916Y2 (ja) | 1994-06-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4680467A (en) | Electron spectroscopy system for chemical analysis of electrically isolated specimens | |
| EP0488067B1 (en) | Ion-scattering spectrometer | |
| JP4562945B2 (ja) | 粒子ビーム装置 | |
| JPH0160452U (enrdf_load_stackoverflow) | ||
| US5032723A (en) | Charged particle energy analyzer | |
| JPS6352428B2 (enrdf_load_stackoverflow) | ||
| Fleischmann et al. | Differential charge-transfer cross section for collisions of H+ on O 2 | |
| EP0501257A3 (en) | Ion scattering spectrometer | |
| US5336886A (en) | Apparatus for measuring a diffraction pattern of electron beams having only elastic scattering electrons | |
| JP2554129Y2 (ja) | ビームファインダ付きファラデーカップ装置 | |
| Funsten et al. | Pinhole detection in thin foils used in space plasma diagnostic instrumentation | |
| JP2653056B2 (ja) | 表面解析装置 | |
| JPH0160352U (enrdf_load_stackoverflow) | ||
| JPS6399750U (enrdf_load_stackoverflow) | ||
| JP3847458B2 (ja) | 小型磁場偏向型質量分析管及びその製造方法 | |
| US3686501A (en) | Charged particle analyzer with means to determine the coordinate position of the sample | |
| JPS587973Y2 (ja) | 電子顕微鏡におけるビ−ム電流測定装置 | |
| JPS63150845A (ja) | 表面解析装置 | |
| JP2961795B2 (ja) | 荷電粒子エネルギー分析器 | |
| JPS6326925Y2 (enrdf_load_stackoverflow) | ||
| JPH0171857U (enrdf_load_stackoverflow) | ||
| JP2003068245A (ja) | 定量的なエネルギー補正機能を持つ飛行時間型質量分析器 | |
| JPS5833643Y2 (ja) | 質量分析装置におけるイオンビ−ム電流検出装置 | |
| JPS63106055U (enrdf_load_stackoverflow) | ||
| JPH117914A (ja) | イオン照射装置 |