JPH0622916Y2 - 表面解析装置 - Google Patents
表面解析装置Info
- Publication number
- JPH0622916Y2 JPH0622916Y2 JP15498187U JP15498187U JPH0622916Y2 JP H0622916 Y2 JPH0622916 Y2 JP H0622916Y2 JP 15498187 U JP15498187 U JP 15498187U JP 15498187 U JP15498187 U JP 15498187U JP H0622916 Y2 JPH0622916 Y2 JP H0622916Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- proton
- proton beam
- scattered
- protons
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005211 surface analysis Methods 0.000 claims description 11
- 230000001133 acceleration Effects 0.000 claims description 7
- 238000005259 measurement Methods 0.000 claims description 7
- 239000012212 insulator Substances 0.000 claims description 6
- 238000005452 bending Methods 0.000 claims 1
- 150000002500 ions Chemical class 0.000 description 12
- 230000004907 flux Effects 0.000 description 10
- 230000007246 mechanism Effects 0.000 description 8
- 238000001228 spectrum Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15498187U JPH0622916Y2 (ja) | 1987-10-09 | 1987-10-09 | 表面解析装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15498187U JPH0622916Y2 (ja) | 1987-10-09 | 1987-10-09 | 表面解析装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0160452U JPH0160452U (enrdf_load_stackoverflow) | 1989-04-17 |
| JPH0622916Y2 true JPH0622916Y2 (ja) | 1994-06-15 |
Family
ID=31432194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15498187U Expired - Lifetime JPH0622916Y2 (ja) | 1987-10-09 | 1987-10-09 | 表面解析装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0622916Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-10-09 JP JP15498187U patent/JPH0622916Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0160452U (enrdf_load_stackoverflow) | 1989-04-17 |
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