JPH0535541B2 - - Google Patents

Info

Publication number
JPH0535541B2
JPH0535541B2 JP61246777A JP24677786A JPH0535541B2 JP H0535541 B2 JPH0535541 B2 JP H0535541B2 JP 61246777 A JP61246777 A JP 61246777A JP 24677786 A JP24677786 A JP 24677786A JP H0535541 B2 JPH0535541 B2 JP H0535541B2
Authority
JP
Japan
Prior art keywords
ion beam
scattered
time
pulsed ion
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61246777A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63102150A (ja
Inventor
Masakazu Aono
Mitsuhiro Katayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN filed Critical RIKEN
Priority to JP61246777A priority Critical patent/JPS63102150A/ja
Publication of JPS63102150A publication Critical patent/JPS63102150A/ja
Publication of JPH0535541B2 publication Critical patent/JPH0535541B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
JP61246777A 1986-10-17 1986-10-17 イオン散乱分光顕微鏡 Granted JPS63102150A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61246777A JPS63102150A (ja) 1986-10-17 1986-10-17 イオン散乱分光顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61246777A JPS63102150A (ja) 1986-10-17 1986-10-17 イオン散乱分光顕微鏡

Publications (2)

Publication Number Publication Date
JPS63102150A JPS63102150A (ja) 1988-05-07
JPH0535541B2 true JPH0535541B2 (enrdf_load_stackoverflow) 1993-05-26

Family

ID=17153503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61246777A Granted JPS63102150A (ja) 1986-10-17 1986-10-17 イオン散乱分光顕微鏡

Country Status (1)

Country Link
JP (1) JPS63102150A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0290049A (ja) * 1988-09-28 1990-03-29 Shimadzu Corp イオン散乱分光装置
JP2567736B2 (ja) * 1990-11-30 1996-12-25 理化学研究所 イオン散乱分析装置
EP0501257B1 (en) * 1991-02-22 1996-08-21 Shimadzu Corporation Ion scattering spectrometer
JP3271304B2 (ja) * 1992-06-30 2002-04-02 株式会社島津製作所 飛行時間形イオン散乱分光装置
KR101052361B1 (ko) * 2008-07-31 2011-07-27 한국표준과학연구원 중에너지 이온빔 산란을 이용한 분광분석기

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5110992A (enrdf_load_stackoverflow) * 1974-07-17 1976-01-28 Hitachi Ltd
JPS5320995A (en) * 1976-08-09 1978-02-25 Minnesota Mining & Mfg Apparatus for surface layer analysis

Also Published As

Publication number Publication date
JPS63102150A (ja) 1988-05-07

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Legal Events

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