JPH0171857U - - Google Patents

Info

Publication number
JPH0171857U
JPH0171857U JP1987166976U JP16697687U JPH0171857U JP H0171857 U JPH0171857 U JP H0171857U JP 1987166976 U JP1987166976 U JP 1987166976U JP 16697687 U JP16697687 U JP 16697687U JP H0171857 U JPH0171857 U JP H0171857U
Authority
JP
Japan
Prior art keywords
excited
ray analysis
charged particle
irradiation chamber
row
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987166976U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987166976U priority Critical patent/JPH0171857U/ja
Publication of JPH0171857U publication Critical patent/JPH0171857U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP1987166976U 1987-10-30 1987-10-30 Pending JPH0171857U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987166976U JPH0171857U (enrdf_load_stackoverflow) 1987-10-30 1987-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987166976U JPH0171857U (enrdf_load_stackoverflow) 1987-10-30 1987-10-30

Publications (1)

Publication Number Publication Date
JPH0171857U true JPH0171857U (enrdf_load_stackoverflow) 1989-05-15

Family

ID=31454851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987166976U Pending JPH0171857U (enrdf_load_stackoverflow) 1987-10-30 1987-10-30

Country Status (1)

Country Link
JP (1) JPH0171857U (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5079389A (enrdf_load_stackoverflow) * 1973-11-12 1975-06-27
JPS5871546A (ja) * 1981-10-23 1983-04-28 Fujitsu Ltd イオン注入装置
JPS58178948A (ja) * 1982-04-12 1983-10-20 Shimadzu Corp 電子線照射型分析装置の試料装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5079389A (enrdf_load_stackoverflow) * 1973-11-12 1975-06-27
JPS5871546A (ja) * 1981-10-23 1983-04-28 Fujitsu Ltd イオン注入装置
JPS58178948A (ja) * 1982-04-12 1983-10-20 Shimadzu Corp 電子線照射型分析装置の試料装置

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