JPS639943B2 - - Google Patents
Info
- Publication number
- JPS639943B2 JPS639943B2 JP55048113A JP4811380A JPS639943B2 JP S639943 B2 JPS639943 B2 JP S639943B2 JP 55048113 A JP55048113 A JP 55048113A JP 4811380 A JP4811380 A JP 4811380A JP S639943 B2 JPS639943 B2 JP S639943B2
- Authority
- JP
- Japan
- Prior art keywords
- detector
- workpiece
- surface plate
- carrier
- surface plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000012212 insulator Substances 0.000 claims description 2
- 238000003754 machining Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 238000001514 detection method Methods 0.000 description 6
- 239000000969 carrier Substances 0.000 description 4
- 230000002950 deficient Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4811380A JPS56146666A (en) | 1980-04-14 | 1980-04-14 | Lapping device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4811380A JPS56146666A (en) | 1980-04-14 | 1980-04-14 | Lapping device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56146666A JPS56146666A (en) | 1981-11-14 |
| JPS639943B2 true JPS639943B2 (zh) | 1988-03-03 |
Family
ID=12794254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4811380A Granted JPS56146666A (en) | 1980-04-14 | 1980-04-14 | Lapping device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56146666A (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220101346A (ko) * | 2021-01-11 | 2022-07-19 | 에스케이실트론 주식회사 | 랩핑 캐리어 및 이를 포함하는 랩핑 장치 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62162464A (ja) * | 1986-01-07 | 1987-07-18 | Hitachi Ltd | ラツピング装置 |
| JPH1034529A (ja) * | 1996-07-18 | 1998-02-10 | Speedfam Co Ltd | 自動定寸装置 |
| JP2003089056A (ja) * | 2001-09-12 | 2003-03-25 | Hamai Co Ltd | 被加工物厚み計測方法 |
| JP2006231471A (ja) | 2005-02-25 | 2006-09-07 | Speedfam Co Ltd | 両面ポリッシュ加工機とその定寸制御方法 |
| JP2006231470A (ja) | 2005-02-25 | 2006-09-07 | Speedfam Co Ltd | 両面ポリッシュ加工機の定寸方法及び定寸装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4884991A (zh) * | 1972-02-01 | 1973-11-10 |
-
1980
- 1980-04-14 JP JP4811380A patent/JPS56146666A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4884991A (zh) * | 1972-02-01 | 1973-11-10 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220101346A (ko) * | 2021-01-11 | 2022-07-19 | 에스케이실트론 주식회사 | 랩핑 캐리어 및 이를 포함하는 랩핑 장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56146666A (en) | 1981-11-14 |
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