JPS6398544U - - Google Patents
Info
- Publication number
- JPS6398544U JPS6398544U JP1986192663U JP19266386U JPS6398544U JP S6398544 U JPS6398544 U JP S6398544U JP 1986192663 U JP1986192663 U JP 1986192663U JP 19266386 U JP19266386 U JP 19266386U JP S6398544 U JPS6398544 U JP S6398544U
- Authority
- JP
- Japan
- Prior art keywords
- automatic alignment
- alignment marks
- shielding
- patterns
- positions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Description
第１図は本考案の一実施例のレチクルを示し、
ａはその平面図、ｂはその使用方法の一例におけ
る平面図、第２図は従来の自動位置合わせマーク
を含むレチクルの平面図、第３図はその使用方法
の一例における平面図である。
１：レチクル、３１，３２，４１，４２：自動
位置合わせマーク、５：Ｘ方向レチクルブライン
ド、６：Ｙ方向レチクルブラインド。
FIG. 1 shows a reticle according to an embodiment of the present invention,
FIG. 2 is a plan view of a reticle including a conventional automatic alignment mark, and FIG. 3 is a plan view of an example of its usage. 1: Reticle, 31, 32, 41, 42: Automatic alignment mark, 5: X-direction reticle blind, 6: Y-direction reticle blind.
Claims (1)
のパターンを他の自動位置合わせマークを遮光し
て選択的に半導体基板上に転写できる位置に備え
たことを特徴とするレチクル。 A reticle characterized in that patterns of automatic alignment marks for multiple types of exposure devices are provided at positions where they can be selectively transferred onto a semiconductor substrate while shielding other automatic alignment marks from light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986192663U JPS6398544U (en) | 1986-12-15 | 1986-12-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986192663U JPS6398544U (en) | 1986-12-15 | 1986-12-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6398544U true JPS6398544U (en) | 1988-06-25 |
Family
ID=31147958
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986192663U Pending JPS6398544U (en) | 1986-12-15 | 1986-12-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6398544U (en) |
-
1986
- 1986-12-15 JP JP1986192663U patent/JPS6398544U/ja active Pending
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