JPS6296642U - - Google Patents
Info
- Publication number
- JPS6296642U JPS6296642U JP1985189704U JP18970485U JPS6296642U JP S6296642 U JPS6296642 U JP S6296642U JP 1985189704 U JP1985189704 U JP 1985189704U JP 18970485 U JP18970485 U JP 18970485U JP S6296642 U JPS6296642 U JP S6296642U
- Authority
- JP
- Japan
- Prior art keywords
- photomask
- wafer
- aligning
- marks
- orientation flat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Description
第１図ないし第３図は、本考案の一実施例を表
わす図である。
図において、１…フオトマスク、２…マスクパ
ターン、３…ウエハー、４…オリエンテーシヨン
フラツト、５…位置合せマーク。
1 to 3 are diagrams showing one embodiment of the present invention. In the figure, 1... photomask, 2... mask pattern, 3... wafer, 4... orientation flat, 5... alignment mark.
Claims (1)
トマスクの方向を合せるためのマークを備えてい
ることを特徴とするフオトマスク。 A photomask characterized by having marks for aligning the direction of the photomask with the orientation flat of the wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985189704U JPS6296642U (en) | 1985-12-09 | 1985-12-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985189704U JPS6296642U (en) | 1985-12-09 | 1985-12-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6296642U true JPS6296642U (en) | 1987-06-19 |
Family
ID=31142246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985189704U Pending JPS6296642U (en) | 1985-12-09 | 1985-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6296642U (en) |
-
1985
- 1985-12-09 JP JP1985189704U patent/JPS6296642U/ja active Pending