JPS6454045U - - Google Patents
Info
- Publication number
- JPS6454045U JPS6454045U JP1987150656U JP15065687U JPS6454045U JP S6454045 U JPS6454045 U JP S6454045U JP 1987150656 U JP1987150656 U JP 1987150656U JP 15065687 U JP15065687 U JP 15065687U JP S6454045 U JPS6454045 U JP S6454045U
- Authority
- JP
- Japan
- Prior art keywords
- alignment
- distance
- dies
- alignment mark
- reticle used
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 1
Description
第1図はレテイクルを示す平面図、第2図は一
実施例におけるアライメントマークを示す図、第
3図は従来のアライメントマークを示す図、第4
図は従来の転写されたアライメントマークを示す
図、第5図はウエハに転写されたレテイクルのシ
ヨツトを示す平面図である。
5…レテイクル、6―1〜6―4…パターン領
域、7…スクライブライン、8…アライメントマ
ーク。
FIG. 1 is a plan view showing a reticle, FIG. 2 is a view showing an alignment mark in one embodiment, FIG. 3 is a view showing a conventional alignment mark, and FIG. 4 is a plan view showing a reticle.
This figure shows a conventional transferred alignment mark, and FIG. 5 is a plan view showing a shot of a reticle transferred to a wafer. 5... Reticle, 6-1 to 6-4... Pattern area, 7... Scribe line, 8... Alignment mark.
Claims (1)
つて、アライメントマークを1個のみ有し、一対
のアライメント・ダイの間隔をずらせて転写され
、両アライメント・ダイのアライメントマークの
間隔をアライメントマーク検出用レンズの間隔に
一致させて使用されるレテイクル。 A reticle used in a reduction projection exposure apparatus, which has only one alignment mark and is transferred by shifting the distance between a pair of alignment dies, and using an alignment mark detection lens to detect the distance between the alignment marks of both alignment dies. A reticle used to match the spacing of.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987150656U JPS6454045U (en) | 1987-09-30 | 1987-09-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987150656U JPS6454045U (en) | 1987-09-30 | 1987-09-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6454045U true JPS6454045U (en) | 1989-04-04 |
Family
ID=31423995
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987150656U Pending JPS6454045U (en) | 1987-09-30 | 1987-09-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6454045U (en) |
-
1987
- 1987-09-30 JP JP1987150656U patent/JPS6454045U/ja active Pending