JPH043444U - - Google Patents
Info
- Publication number
- JPH043444U JPH043444U JP4350590U JP4350590U JPH043444U JP H043444 U JPH043444 U JP H043444U JP 4350590 U JP4350590 U JP 4350590U JP 4350590 U JP4350590 U JP 4350590U JP H043444 U JPH043444 U JP H043444U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- confirming
- attachment position
- pattern
- photomask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012790 confirmation Methods 0.000 description 1
Description
第１図は本考案のマスクの平面図、第２図は従
来のマスクの平面図、第３図はペリクル貼り付け
断面図、第４図はパターン拡大図である。
１…レチクル、２…ペリクル、３…アライメン
トマーク、４…ペリクル貼り付け位置確認パター
ン。
FIG. 1 is a plan view of the mask of the present invention, FIG. 2 is a plan view of a conventional mask, FIG. 3 is a sectional view of a pellicle attached, and FIG. 4 is an enlarged view of a pattern. 1... Reticle, 2... Pellicle, 3... Alignment mark, 4... Pellicle pasting position confirmation pattern.
Claims (1)
クにおいて、マスクにペリクル貼り付け位置を確
認するパターンを設けたことを特徴とするフオト
マスク。 (2) ペクリル貼り付け位置を確認するパターン
はペリクルの辺に対応する位置に少なくとも２個
設けることを特徴とする請求項第１項のフオトマ
スク。 (3) ペリクル貼り付け位置を確認するパターン
を階段状の形状としたことを特徴とする請求項第
１項のフオトマスク。[Scope of Claim for Utility Model Registration] (1) A photomask used with a pellicle attached thereto, characterized in that the mask is provided with a pattern for confirming the pellicle attachment position. (2) The photomask according to claim 1, wherein at least two patterns for confirming the pellicle attachment position are provided at positions corresponding to sides of the pellicle. (3) The photomask according to claim 1, wherein the pattern for confirming the pellicle attachment position has a step-like shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4350590U JPH043444U (en) | 1990-04-25 | 1990-04-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4350590U JPH043444U (en) | 1990-04-25 | 1990-04-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH043444U true JPH043444U (en) | 1992-01-13 |
Family
ID=31555970
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4350590U Pending JPH043444U (en) | 1990-04-25 | 1990-04-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH043444U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53155471U (en) * | 1977-05-13 | 1978-12-06 |
-
1990
- 1990-04-25 JP JP4350590U patent/JPH043444U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53155471U (en) * | 1977-05-13 | 1978-12-06 |