JPH0373936U - - Google Patents
Info
- Publication number
- JPH0373936U JPH0373936U JP13431389U JP13431389U JPH0373936U JP H0373936 U JPH0373936 U JP H0373936U JP 13431389 U JP13431389 U JP 13431389U JP 13431389 U JP13431389 U JP 13431389U JP H0373936 U JPH0373936 U JP H0373936U
- Authority
- JP
- Japan
- Prior art keywords
- mask substrate
- photomask
- utility
- bar code
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は本考案のフオトマスクの実施例を示す
側面図、第２はペリクルを備えたマスクの一般的
な構造を示す図、であつて、
図に於いて、１……マスク基板、２……マスク
・パターン、３……ペリクル、４……ペリクル・
フレーム、５……透明膜、６……フレームの外側
面、７……バーコード、である。
FIG. 1 is a side view showing an embodiment of the photomask of the present invention, and the second is a diagram showing the general structure of a mask equipped with a pellicle. In the figure, 1...mask substrate, 2... ...mask pattern, 3...pellicle, 4...pellicle
Frame, 5... transparent film, 6... outer surface of frame, 7... barcode.
補正 平２．２．７
図面の簡単な説明を次のように補正する。
明細書の第６頁第１６行、「第２は」を「第２
図は」と訂正する。Amendment 2.2.7 The brief description of the drawing is amended as follows. On page 6, line 16 of the specification, “second” is changed to “second
The figure is corrected.
Claims (1)
板１上に設けられたペリクル・フレーム４の、前
記マスク基板面に対し垂直な外側面６にバーコー
ド７が設けられて成ることを特徴とするフオトマ
スク。 1. A photomask for projection exposure, characterized in that a bar code 7 is provided on an outer surface 6 of a pellicle frame 4 provided on a mask substrate 1, which is perpendicular to the surface of the mask substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13431389U JPH0373936U (en) | 1989-11-17 | 1989-11-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13431389U JPH0373936U (en) | 1989-11-17 | 1989-11-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0373936U true JPH0373936U (en) | 1991-07-25 |
Family
ID=31681658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13431389U Pending JPH0373936U (en) | 1989-11-17 | 1989-11-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0373936U (en) |
-
1989
- 1989-11-17 JP JP13431389U patent/JPH0373936U/ja active Pending