JPS62123648U - - Google Patents
Info
- Publication number
- JPS62123648U JPS62123648U JP1986010595U JP1059586U JPS62123648U JP S62123648 U JPS62123648 U JP S62123648U JP 1986010595 U JP1986010595 U JP 1986010595U JP 1059586 U JP1059586 U JP 1059586U JP S62123648 U JPS62123648 U JP S62123648U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- thin film
- mask pattern
- pellicle
- transparent thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 3
Landscapes
- Weting (AREA)
Description
第１図、第２図は本願考案の実施例を示す斜視
図、及び断面図である。
図中、１は透明基板、２はマスクパターン、３
は葉枠、４はペリクル透明薄膜である。
FIGS. 1 and 2 are a perspective view and a sectional view showing an embodiment of the present invention. In the figure, 1 is a transparent substrate, 2 is a mask pattern, and 3
4 is a leaf frame, and 4 is a pellicle transparent thin film.
Claims (1)
ターンと、該基板表面上に設けられ枠部材を介し
て該マスクパターン上の所定の距離の位置に設け
られたペリクルの透明薄膜を有し、 該透明薄膜が多層構造をなし、適時一枚一枚剥
すようにしてなることを特徴とするペリクルフオ
トマスクの構造。[Claims for Utility Model Registration] A transparent substrate, a mask pattern formed on the surface of the substrate, and a pellicle provided on the surface of the substrate at a predetermined distance above the mask pattern via a frame member. 1. A structure of a pellicle photomask, comprising: a transparent thin film, the transparent thin film having a multilayer structure, and being peeled off one by one at an appropriate time.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986010595U JPS62123648U (en) | 1986-01-28 | 1986-01-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986010595U JPS62123648U (en) | 1986-01-28 | 1986-01-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62123648U true JPS62123648U (en) | 1987-08-06 |
Family
ID=30797035
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986010595U Pending JPS62123648U (en) | 1986-01-28 | 1986-01-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62123648U (en) |
-
1986
- 1986-01-28 JP JP1986010595U patent/JPS62123648U/ja active Pending