JPS6397251U - - Google Patents
Info
- Publication number
- JPS6397251U JPS6397251U JP19330586U JP19330586U JPS6397251U JP S6397251 U JPS6397251 U JP S6397251U JP 19330586 U JP19330586 U JP 19330586U JP 19330586 U JP19330586 U JP 19330586U JP S6397251 U JPS6397251 U JP S6397251U
- Authority
- JP
- Japan
- Prior art keywords
- layer
- type
- electrode
- thyristor
- gate electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 2
- 229920005591 polysilicon Polymers 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000000926 separation method Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims 1
- 229910052796 boron Inorganic materials 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
Landscapes
- Thyristors (AREA)
- Semiconductor Integrated Circuits (AREA)
Description
第1図aおよびbは本考案の一実施例を示す平
面図およびA―A線断面図、第2図は第1図のC
部の拡大断面図、第3図aおよびbは従来のサイ
リスタの一例の平面図およびB―B線断面図であ
る。
11,21…N形半導体基板、12,22…P
形絶縁分離層、13,23…P形ベース層、14
,24…N形エミツタ層、15,25…絶縁膜層
、16,26…カソード電極、17,27…ゲー
ト電極、18,28…アノード電極、19…ポリ
シリコンの抵抗体。
Figures 1a and b are a plan view and a cross-sectional view taken along line A--A showing an embodiment of the present invention, and Figure 2 is a
FIGS. 3A and 3B are a plan view and a sectional view taken along the line B--B of an example of a conventional thyristor. 11, 21...N type semiconductor substrate, 12, 22...P
type insulating separation layer, 13, 23...P type base layer, 14
, 24... N-type emitter layer, 15, 25... Insulating film layer, 16, 26... Cathode electrode, 17, 27... Gate electrode, 18, 28... Anode electrode, 19... Polysilicon resistor.
Claims (1)
にP形ベース層とN形エミツタ層とを形成したの
ちP―N接合層上に絶縁層を形成し、その後カソ
ード電極とゲート電極とアノード電極とを設けた
サイリスタにおいて、カソード電極とゲート電極
との間にポリシリコンの抵抗体を所定の厚さおよ
び形状に形成し、イオン注入法によつてボロンを
注入して所定の値の電気伝導度としたことを特徴
とするサイリスタ。 After forming a P-type insulating separation layer on an N-type semiconductor substrate, and further forming a P-type base layer and an N-type emitter layer, an insulating layer is formed on the P-N junction layer, and then a cathode electrode, a gate electrode, and an anode are formed. In a thyristor with an electrode, a polysilicon resistor is formed in a predetermined thickness and shape between the cathode electrode and the gate electrode, and boron is implanted by ion implantation to achieve a predetermined electrical conductivity. A thyristor that is characterized by its high temperature.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19330586U JPS6397251U (en) | 1986-12-15 | 1986-12-15 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19330586U JPS6397251U (en) | 1986-12-15 | 1986-12-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6397251U true JPS6397251U (en) | 1988-06-23 |
Family
ID=31149207
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19330586U Pending JPS6397251U (en) | 1986-12-15 | 1986-12-15 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6397251U (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5447492A (en) * | 1977-09-21 | 1979-04-14 | Nec Corp | Thyristor |
JPS5565461A (en) * | 1978-11-10 | 1980-05-16 | Oki Electric Ind Co Ltd | Semiconductor switch |
JPS5624973A (en) * | 1979-08-06 | 1981-03-10 | Mitsubishi Electric Corp | Semiconductor switching element |
JPS56105673A (en) * | 1980-01-28 | 1981-08-22 | Nec Corp | Semiconductor device |
JPS5784173A (en) * | 1980-11-14 | 1982-05-26 | Oki Electric Ind Co Ltd | Manufacture of semicondcutor switch |
-
1986
- 1986-12-15 JP JP19330586U patent/JPS6397251U/ja active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5447492A (en) * | 1977-09-21 | 1979-04-14 | Nec Corp | Thyristor |
JPS5565461A (en) * | 1978-11-10 | 1980-05-16 | Oki Electric Ind Co Ltd | Semiconductor switch |
JPS5624973A (en) * | 1979-08-06 | 1981-03-10 | Mitsubishi Electric Corp | Semiconductor switching element |
JPS56105673A (en) * | 1980-01-28 | 1981-08-22 | Nec Corp | Semiconductor device |
JPS5784173A (en) * | 1980-11-14 | 1982-05-26 | Oki Electric Ind Co Ltd | Manufacture of semicondcutor switch |