JPS6394962U - - Google Patents
Info
- Publication number
- JPS6394962U JPS6394962U JP19021486U JP19021486U JPS6394962U JP S6394962 U JPS6394962 U JP S6394962U JP 19021486 U JP19021486 U JP 19021486U JP 19021486 U JP19021486 U JP 19021486U JP S6394962 U JPS6394962 U JP S6394962U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- plasma
- microwave
- utility
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 3
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 3
- 239000002826 coolant Substances 0.000 claims 1
- 239000003507 refrigerant Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19021486U JPS6394962U (fr) | 1986-12-09 | 1986-12-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19021486U JPS6394962U (fr) | 1986-12-09 | 1986-12-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6394962U true JPS6394962U (fr) | 1988-06-18 |
Family
ID=31143230
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19021486U Pending JPS6394962U (fr) | 1986-12-09 | 1986-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6394962U (fr) |
-
1986
- 1986-12-09 JP JP19021486U patent/JPS6394962U/ja active Pending
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