JPS6394957U - - Google Patents
Info
- Publication number
- JPS6394957U JPS6394957U JP18784886U JP18784886U JPS6394957U JP S6394957 U JPS6394957 U JP S6394957U JP 18784886 U JP18784886 U JP 18784886U JP 18784886 U JP18784886 U JP 18784886U JP S6394957 U JPS6394957 U JP S6394957U
- Authority
- JP
- Japan
- Prior art keywords
- source
- vapor deposition
- evaporation
- emitting section
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 8
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims 5
- 230000008020 evaporation Effects 0.000 claims 4
- 238000001704 evaporation Methods 0.000 claims 4
- 239000002245 particle Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18784886U JPS6394957U (no) | 1986-12-08 | 1986-12-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18784886U JPS6394957U (no) | 1986-12-08 | 1986-12-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6394957U true JPS6394957U (no) | 1988-06-18 |
Family
ID=31138682
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18784886U Pending JPS6394957U (no) | 1986-12-08 | 1986-12-08 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6394957U (no) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160090017A (ko) * | 2015-01-21 | 2016-07-29 | 엘지이노텍 주식회사 | 발광 소자 및 이를 제조하는 전자 빔 증착 장치 |
-
1986
- 1986-12-08 JP JP18784886U patent/JPS6394957U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160090017A (ko) * | 2015-01-21 | 2016-07-29 | 엘지이노텍 주식회사 | 발광 소자 및 이를 제조하는 전자 빔 증착 장치 |
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