JPS61187373U - - Google Patents
Info
- Publication number
- JPS61187373U JPS61187373U JP7174085U JP7174085U JPS61187373U JP S61187373 U JPS61187373 U JP S61187373U JP 7174085 U JP7174085 U JP 7174085U JP 7174085 U JP7174085 U JP 7174085U JP S61187373 U JPS61187373 U JP S61187373U
- Authority
- JP
- Japan
- Prior art keywords
- filament
- crucible
- vapor deposition
- vapor
- deposition apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7174085U JPS61187373U (no) | 1985-05-15 | 1985-05-15 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7174085U JPS61187373U (no) | 1985-05-15 | 1985-05-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61187373U true JPS61187373U (no) | 1986-11-21 |
Family
ID=30609501
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7174085U Pending JPS61187373U (no) | 1985-05-15 | 1985-05-15 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61187373U (no) |
-
1985
- 1985-05-15 JP JP7174085U patent/JPS61187373U/ja active Pending