JPH0174261U - - Google Patents
Info
- Publication number
- JPH0174261U JPH0174261U JP1987169404U JP16940487U JPH0174261U JP H0174261 U JPH0174261 U JP H0174261U JP 1987169404 U JP1987169404 U JP 1987169404U JP 16940487 U JP16940487 U JP 16940487U JP H0174261 U JPH0174261 U JP H0174261U
- Authority
- JP
- Japan
- Prior art keywords
- counter electrode
- grid
- evaporation source
- potential
- filament
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 3
- 239000011261 inert gas Substances 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987169404U JPH0174261U (no) | 1987-11-05 | 1987-11-05 | |
| US07/228,451 US4960072A (en) | 1987-08-05 | 1988-08-05 | Apparatus for forming a thin film |
| US07/597,331 US5112466A (en) | 1987-08-05 | 1990-09-14 | Apparatus for forming a thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987169404U JPH0174261U (no) | 1987-11-05 | 1987-11-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0174261U true JPH0174261U (no) | 1989-05-19 |
Family
ID=31459430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987169404U Pending JPH0174261U (no) | 1987-08-05 | 1987-11-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0174261U (no) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09209131A (ja) * | 1996-02-08 | 1997-08-12 | Ricoh Co Ltd | 薄膜形成装置 |
-
1987
- 1987-11-05 JP JP1987169404U patent/JPH0174261U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09209131A (ja) * | 1996-02-08 | 1997-08-12 | Ricoh Co Ltd | 薄膜形成装置 |
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