JPS6346462U - - Google Patents
Info
- Publication number
- JPS6346462U JPS6346462U JP13886686U JP13886686U JPS6346462U JP S6346462 U JPS6346462 U JP S6346462U JP 13886686 U JP13886686 U JP 13886686U JP 13886686 U JP13886686 U JP 13886686U JP S6346462 U JPS6346462 U JP S6346462U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- evaporation
- ion
- substrate
- deflection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 4
- 238000005566 electron beam evaporation Methods 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims 2
- 230000008020 evaporation Effects 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13886686U JPS6346462U (no) | 1986-09-10 | 1986-09-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13886686U JPS6346462U (no) | 1986-09-10 | 1986-09-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6346462U true JPS6346462U (no) | 1988-03-29 |
Family
ID=31044233
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13886686U Pending JPS6346462U (no) | 1986-09-10 | 1986-09-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6346462U (no) |
-
1986
- 1986-09-10 JP JP13886686U patent/JPS6346462U/ja active Pending