JPH0229149U - - Google Patents
Info
- Publication number
- JPH0229149U JPH0229149U JP10813088U JP10813088U JPH0229149U JP H0229149 U JPH0229149 U JP H0229149U JP 10813088 U JP10813088 U JP 10813088U JP 10813088 U JP10813088 U JP 10813088U JP H0229149 U JPH0229149 U JP H0229149U
- Authority
- JP
- Japan
- Prior art keywords
- plasma generation
- generation chamber
- filament
- anode
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 3
- 239000012159 carrier gas Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10813088U JPH0229149U (no) | 1988-08-17 | 1988-08-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10813088U JPH0229149U (no) | 1988-08-17 | 1988-08-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0229149U true JPH0229149U (no) | 1990-02-26 |
Family
ID=31343174
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10813088U Pending JPH0229149U (no) | 1988-08-17 | 1988-08-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0229149U (no) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05225923A (ja) * | 1991-10-11 | 1993-09-03 | Genus Inc | イオン源 |
-
1988
- 1988-08-17 JP JP10813088U patent/JPH0229149U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05225923A (ja) * | 1991-10-11 | 1993-09-03 | Genus Inc | イオン源 |