JPH01119051U - - Google Patents

Info

Publication number
JPH01119051U
JPH01119051U JP1312888U JP1312888U JPH01119051U JP H01119051 U JPH01119051 U JP H01119051U JP 1312888 U JP1312888 U JP 1312888U JP 1312888 U JP1312888 U JP 1312888U JP H01119051 U JPH01119051 U JP H01119051U
Authority
JP
Japan
Prior art keywords
deposited metal
vacuum
electron beam
vacuum space
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1312888U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1312888U priority Critical patent/JPH01119051U/ja
Publication of JPH01119051U publication Critical patent/JPH01119051U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1312888U 1988-02-03 1988-02-03 Pending JPH01119051U (no)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1312888U JPH01119051U (no) 1988-02-03 1988-02-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1312888U JPH01119051U (no) 1988-02-03 1988-02-03

Publications (1)

Publication Number Publication Date
JPH01119051U true JPH01119051U (no) 1989-08-11

Family

ID=31223182

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1312888U Pending JPH01119051U (no) 1988-02-03 1988-02-03

Country Status (1)

Country Link
JP (1) JPH01119051U (no)

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