JPS6437458U - - Google Patents
Info
- Publication number
- JPS6437458U JPS6437458U JP1987133603U JP13360387U JPS6437458U JP S6437458 U JPS6437458 U JP S6437458U JP 1987133603 U JP1987133603 U JP 1987133603U JP 13360387 U JP13360387 U JP 13360387U JP S6437458 U JPS6437458 U JP S6437458U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- pierce
- electron gun
- type electron
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 238000001883 metal evaporation Methods 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/20—Recycling
Landscapes
- Manufacture And Refinement Of Metals (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987133603U JPH0630843Y2 (ja) | 1987-09-01 | 1987-09-01 | 金属の蒸発装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987133603U JPH0630843Y2 (ja) | 1987-09-01 | 1987-09-01 | 金属の蒸発装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6437458U true JPS6437458U (no) | 1989-03-07 |
| JPH0630843Y2 JPH0630843Y2 (ja) | 1994-08-17 |
Family
ID=31391616
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987133603U Expired - Lifetime JPH0630843Y2 (ja) | 1987-09-01 | 1987-09-01 | 金属の蒸発装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0630843Y2 (no) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009275244A (ja) * | 2008-05-13 | 2009-11-26 | Ulvac Japan Ltd | 金属酸化膜の蒸着方法及びプラズマディスプレイパネルの製造方法 |
| JP2012207310A (ja) * | 2012-07-13 | 2012-10-25 | Ulvac Japan Ltd | 金属酸化膜の蒸着方法及びプラズマディスプレイパネルの製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6169266U (no) * | 1984-10-09 | 1986-05-12 |
-
1987
- 1987-09-01 JP JP1987133603U patent/JPH0630843Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6169266U (no) * | 1984-10-09 | 1986-05-12 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009275244A (ja) * | 2008-05-13 | 2009-11-26 | Ulvac Japan Ltd | 金属酸化膜の蒸着方法及びプラズマディスプレイパネルの製造方法 |
| JP2012207310A (ja) * | 2012-07-13 | 2012-10-25 | Ulvac Japan Ltd | 金属酸化膜の蒸着方法及びプラズマディスプレイパネルの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0630843Y2 (ja) | 1994-08-17 |